Mechanical sensors integrated in a commercial CMOS technology

Sensors and Actuators, A: Physical

Volumn 62, Issue 1-3, 1997, Pages 698-704

  Bausells, Joan ^a   Carrabina, Jordi ^a   Merlos, Angel ^a   Bota, Sebastian ^b   Samitier, Josep ^b,c  

^a UNIVERSITAT AUTÒNOMA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

^c PHILIPS RESEARCH LABORATORIES   (Germany)

Author keywords

Accelerometers; CMOS; Post processing; Pressure sensors

Indexed keywords

ACCELEROMETERS; CMOS INTEGRATED CIRCUITS; INTEGRATED CIRCUIT LAYOUT; MICROELECTROMECHANICAL DEVICES; MICROELECTRONIC PROCESSING; MICROMACHINING; PRESSURE TRANSDUCERS;

INTEGRATED SENSOR SYSTEMS; PRESSURE SENSORS;

SENSORS;

EID: 0031175916     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)01588-4     Document Type: Article

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