Design and analysis of a miniature reciprocating compressor driven by a comb drive

ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE)

Volumn 2000-B, Issue , 2000, Pages 111-118

  Hao, Z ^a   Kapat, J S ^a   Chow, L C ^a   Sundaram, K B ^a  

^a UNIVERSITY OF CENTRAL FLORIDA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPRESSION RATIO (MACHINERY); COMPUTATIONAL FLUID DYNAMICS;

BASIC PARAMETERS; COMBDRIVE; COMPRESSOR CHAMBERS; COMPRESSOR DRIVEN; DESIGN AND ANALYSIS; ELECTROSTATIC COMB DRIVES; MICRO VALVES; SIMPLE STRUCTURES; VERTICAL COMB DRIVE; WORKING MEDIUM;

RECIPROCATING COMPRESSORS;

EID: 85119678470     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1115/IMECE2000-1303     Document Type: Conference Paper

References (24)

1. Wegeng, R. S., and Drost, M. K., 1994, "Developing New Miniature Energy Systems", Mechanical Engineering, ASME, 119, pp. 82-84.
2. Carter, H. C., Chow, L. C., Kapat, J. S., Laveau, A., Sundaram, K. B., Vaidya, J., 1999, "Component Fabrication and Testing for a Meso- Scale Refrigerator", AIAA 1999 Space Technology Conference and Exposition, AIAA 99-4514.
3. Friedrich, M., Drost, M. K. Armstrong, R, Bates, J., Bauman, N., Brooks, K., Brown, D., Cameron, R., Hanna, B., and Hatley, D., 1999, "Manportable Microtechnology-based Absorption Heat Pump," Workshop on Microchemical Systems and Their Applications, Army Research Office, June 16-18, Reston, VA.
4. Shannon, M. A., Philpott, M. L., Miller, N. R., Bullard, C. W., Beebe, D. J., Jacobi, A. M., Hmjac, P. S., Saif, T., Aluru, N., Sehitoglu, H, Rockett, A., and Economy, E., 1999, "Integrated Mesoscopic Cooler Circuits (IMCCS)," Proceedings of the ASME, AES-Vol. 39, pp. 75 - 82.
5. Ashraf, N. S., Carter, H. C., Casey, K. C., Chow, L. C., Corban, S., Drost, M. K., Gumm, A. J., Hao, Z., Hasan, A. Q., Kapat, J. S., Kramer, L., Newton, M., Sundaram, K. B., Vaidya, J., Wong, C. C., Yerkes, K. 1999, "Design and Analysis of a Meso-Scale Refrigerator," Proceedings of the ASME, HTD-Vol. 364-3, pp. 99-116.
6. Laveau, L., Kapat, J. S., Chow, L. C., Enikov, E., and Sundaram, K. B., 2000, "Design, Analysis and Fabrication of a Meso-Scale Centrifugal Compressor," International Mechanical Engineering Congress & Exposition, November 5-10, Orlando, Florida.
7. Shoji, S., and Esashi, M., 1994, "Microflow devices and Systems", J. of Micromech Microeng, vol. 4, pp. 157-171.
8. Jacobson, S. A., 1998, "Aerothermal Challenges in the Design of a Microfabricated Gas Turbine Engine," AIAA 98-2575.
9. Scheeper, P. R., Olthuis, W., and Bergveld, P., 1994, "The design, fabrication and testing of corrugated silicon nitride diaphragms", J. MEMS, vol. 3, pp. 36-42.
10. Tang, W. C., Nguyen, T. H., and Howe, R. T., 1989, "Lateral Driven Polysilicon Resonant Microstructures", Proceedings IEEE Micro Electro Mechanical Systems, pp. 53-59.
11. Kovacs, G., 1998, Micromachined Transducers Sourcebook, McGraw-Hill.
12. Giovanni, M. D., 1982, Flat and corrugated diaphragm design handbooks.
13. CFD Research Corporation, Huntsville, Alabama.
14. Fatikow, S., Rembold, U., 1997, "Microsystem Technology and Microrobotics", Springer.
15. Tang, W. C., Nguyen, T. H., 1990, " Electrostatic Drive of Lateral Polysilicon Resonators", Trsducers'89, Proceedings of the 5th International Conference on Solid-State Sensors and Actuators and Eurosensors III, pp.328-331, Vol.2.
16. Rosa, M. A., Dimitrijev, S. and Harrison, H. B., 1998, "Improved Operation of Micromechanical Comb-Drive Actuators through the use of a New Angled Comb Finger Design", Journal of Intelligent Material Systems and Structures, Vol. 9, pp. 283-290.
17. Ye, W. Mukheijee, S., and MacDonald, N. C. 1998, "Optimal Shape Design of an Electrostatic Comb Drive in Microelectromechanical Systems", Journal of Microelectromechanical Systems, Vol. 7, No. 1, pp. 16-26.
18. Hirano, T. Furuhata, T., 1992, "Design, Fabrication, and Operation of Submicron Gap Comb-Drive Microactuators", Journal of Microelectromechanical Systems, Vol. 1, No. 1, pp.52-59.
19. Zappe, S., Baltzer, M., 1997,"Electrostatically Driven Linear Micro-actuators: FE analysis and Fabrication", Journal of Micromech. Microeng., pp. 204-209, Vol. 7.
20. Yao, J. J., Arney, S. C., 1992, "Fabrication of High Frequency Two-Dimensional Nanoactuators for Scanned Probe Devices", Journal of Microelectromechanical Systems, Vol. 1, No. 1, pp. 14-22.
21. Legtenberg, R., Groeneveld, A. W., 1996, "Comb-Drive Actuators for Large Displacements", Journal of Micromech. Microeng. , pp.320-329, Vol. 6.
22. Bourouina, T. and Grandchamp, J. P., 1996, "Modeling micropumps with electrical equivalent networks", Journal of Micromech. Microeng., pp. 398-404, Vol. 6.
23. Carmona, M. Marco, S., Samitier, J., and Morante, J. R., 1995,"Dynamic Simulations of Micropumps", Journal of Micromech. Microeng., pp. 128-130, Vol. 5.
24. Voigt, P., Schrag, G., Wachutka, G., 1998, "Electrofluidic fullsystem modelling of a flap valve micropump based on Kirchhoffian network theory", Sensors and Actuators A, pp. 9-14, Vol. 66.