A microscale quadrupole mass spectrometer for ion species analysis

40th AIAA/ASME/SAE/ASEE Joint Propulsion Conference and Exhibit

Volumn , Issue , 2004, Pages

  Deshmukh, Satwik H ^a   King, Lyon B ^b   Monroe, Christopher R ^c  

^a Aerophysics Inc   (United States)

^b MICHIGAN TECHNOLOGICAL UNIVERSITY   (United States)

^c UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BATCH DATA PROCESSING; CHEMICAL DETECTION; COST EFFECTIVENESS; DIAGNOSIS; ELECTRODES; GALLIUM ARSENIDE; III-V SEMICONDUCTORS; MOLECULAR BEAM EPITAXY; PLASMA DIAGNOSTICS; PROPULSION;

DETECTION OF CHEMICALS; ELECTRIC CHARACTERIZATION; PHARMACEUTICAL APPLICATIONS; QUADRUPOLE MASS FILTERS; QUADRUPOLE MASS SPECTROMETER; RESIDUAL GAS ANALYSIS; SEMI-CONDUCTOR FABRICATION; TRANSMISSION EFFICIENCY;

QUALITY CONTROL;

EID: 85086809535     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2514/6.2004-3444     Document Type: Conference Paper

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