Micro-machining using high energy picosecond laser pulses a cause-effect consideration

ICALEO 2004 - 23rd International Congress on Applications of Laser and Electro-Optics, Congress Proceedings

Volumn , Issue , 2004, Pages

  Ostendorf, Andreas ^a   Siegel, Frank ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Ablation; Laser micro machining; Short and ultrashort pulse technology

Indexed keywords

ABLATION; EXCIMER LASERS; MICROMACHINING; PICOSECOND LASERS; PUMPING (LASER); SILICON WAFERS; SOLID STATE LASERS; THERMAL CONDUCTIVITY;

FEMTOSECOND LASER SYSTEM; LASER MICRO-MACHINING; MATERIAL ABLATION; PROCESS PARAMETERS; PROCESS UNDERSTANDING; Q-SWITCHED SOLID-STATE LASERS; SHORT- AND ULTRASHORT PULSE TECHNOLOGY; THERMAL INFLUENCE;

LASER MATERIALS PROCESSING;

EID: 85085398811     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.2351/1.5060348     Document Type: Conference Paper

References (8)

1. Friedrich Dausinger, Helmut Hügel, Vitali Konov: Micro-machining with ultrashort laser pulses: From basic understanding to technical applications, in proceedings of Conference ALT' 02, 15-20 September 2002, Adelboden (Switzerland)
2. Friedrich Dausinger: Femtosecond technology for precision manufacturing: Fundamental and technical aspects, in RIKEN Review No. 50 (January, 2003): Focused on Laser Precision Micro Fabrication (LPM 2002), 77-82
3. Andreas Ostendorf, Christian Kulik, Thorsten Bauer, Nico Bärsch: Ablation of metals and semiconductors with ultrashort-pulsed lasers, improving surface qualities of micro cuts and grooves, in proceedings of SPIE Vol. 5340, 2004, 153-163
4. Antoon Blom et al.: Process spread reduction of laser micro-spot welding of thin copper parts using real time control, in: proceedings of SPIE Vol. 4977, 2003, 493-507
5. st international CIRP seminar on micro and nano technology, Copenhagen, Denmark, November 2003, 77-80
6. Hans Kurt Tönshoff, Andreas Ostendorf, Klaus Körber, Nico Bärsch: Ablation and cutting of planar silicon devices using femtosecond laser pulses, in Applied Physics A 77, 237-242, 2003
7. J. Jandeleit et al.: Fundamental investigations of micromachining by nano- and picosecond laser radiation, in: Applied Surface Science 127-129 (1998), 885-891
8. B. N. Chichkov et al.: Femtosecond, picosecond and nanosecond laser ablation of solids, in: Applied Physics A 63, 1996, 109-115