Ablation of metals and semiconductors with ultrashort-pulsed lasers: Improving surface qualities of microcuts and grooves

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5340, Issue , 2004, Pages 153-163

  Ostendorf, A ^a   Kulik, C ^a   Bauer, T ^a   Barsch N ^a  

^a LASER ZENTRUM HANNOVER E V   (Germany)

Author keywords

Cutting; Femtosecond; Focus; Grooves; Laser; Microstructure

Indexed keywords

GRAIN SIZE AND SHAPE; INDUSTRIAL APPLICATIONS; OPTIMIZATION; PARAMETER ESTIMATION; THERMAL EFFECTS; WAVE PROPAGATION;

FEMTOSECOND; GROOVES; THEMAL DAMAGE;

LASER PULSES;

EID: 3543130129     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.530692     Document Type: Conference Paper

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