Fundamental investigations of micromachining by nano- and picosecond laser radiation

Applied Surface Science

Volumn 127-129, Issue , 1998, Pages 885-891

  Jandeleit, J ^a   Horn, A ^a   Weichenhain, R ^a   Kreutz, E W ^a   Poprawe, R ^a  

^a RWTH AACHEN UNIVERSITY   (Germany)

Author keywords

Material removal; Micromachining; Nanosecond laser pulses; Picosecond laser pulses

Indexed keywords

LASER BEAM EFFECTS; MELTING; MICROSTRUCTURE; NEODYMIUM LASERS; PULSED LASER APPLICATIONS; PUMPING (LASER); SECOND HARMONIC GENERATION; SILICON CARBIDE; SILICON NITRIDE; SOLIDIFICATION; TUNGSTEN CARBIDE; VAPORIZATION;

LASER MICROMACHINING; THIRD HARMONIC GENERATION;

MICROMACHINING;

EID: 0032070255     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0169-4332(97)00762-9     Document Type: Article

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