메뉴 건너뛰기




Volumn 139, Issue , 2018, Pages 989-998

Mechanism of SiOx particles formation during CVD graphene growth on Cu substrates

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERIC PRESSURE; COPPER; GRAIN BOUNDARIES; GRAPHENE; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; SILICON COMPOUNDS; SUBSTRATES; TRANSMISSION ELECTRON MICROSCOPY;

EID: 85053207149     PISSN: 00086223     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.carbon.2018.08.007     Document Type: Article
Times cited : (28)

References (37)
  • 1
    • 33847690144 scopus 로고    scopus 로고
    • The rise of graphene
    • Geim, A.K., Novoselov, K.S., The rise of graphene. Nat. Mater., 6(3), 2007, 183.
    • (2007) Nat. Mater. , vol.6 , Issue.3 , pp. 183
    • Geim, A.K.1    Novoselov, K.S.2
  • 3
    • 84906570484 scopus 로고    scopus 로고
    • Graphene and graphene-based materials for energy storage applications
    • Zhu, J., Yang, D., Yin, Z., Yan, Q., Zhang, H., Graphene and graphene-based materials for energy storage applications. Small 10:17 (2014), 3480–3498.
    • (2014) Small , vol.10 , Issue.17 , pp. 3480-3498
    • Zhu, J.1    Yang, D.2    Yin, Z.3    Yan, Q.4    Zhang, H.5
  • 4
    • 66749119012 scopus 로고    scopus 로고
    • Large-area synthesis of high-quality and uniform graphene films on copper foils
    • Li, X., Cai, W., An, J., Kim, S., Nah, J., Yang, D., et al. Large-area synthesis of high-quality and uniform graphene films on copper foils. Science 324:5932 (2009), 1312–1314.
    • (2009) Science , vol.324 , Issue.5932 , pp. 1312-1314
    • Li, X.1    Cai, W.2    An, J.3    Kim, S.4    Nah, J.5    Yang, D.6
  • 5
    • 77956430820 scopus 로고    scopus 로고
    • Roll-to-roll production of 30-inch graphene films for transparent electrodes
    • Bae, S., Kim, H., Lee, Y., Xu, X., Park, J.S., Zheng, Y., et al. Roll-to-roll production of 30-inch graphene films for transparent electrodes. Nat. Nanotechnol., 5(8), 2010, 574.
    • (2010) Nat. Nanotechnol. , vol.5 , Issue.8 , pp. 574
    • Bae, S.1    Kim, H.2    Lee, Y.3    Xu, X.4    Park, J.S.5    Zheng, Y.6
  • 6
    • 84892644790 scopus 로고    scopus 로고
    • Electrochemical properties of CVD grown pristine graphene: monolayer-vs. quasi-graphene
    • Brownson, D.A., Varey, S.A., Hussain, F., Haigh, S.J., Banks, C.E., Electrochemical properties of CVD grown pristine graphene: monolayer-vs. quasi-graphene. Nanoscale 6:3 (2014), 1607–1621.
    • (2014) Nanoscale , vol.6 , Issue.3 , pp. 1607-1621
    • Brownson, D.A.1    Varey, S.A.2    Hussain, F.3    Haigh, S.J.4    Banks, C.E.5
  • 7
    • 77957118054 scopus 로고    scopus 로고
    • Electronic transport in polycrystalline graphene
    • Yazyev, O.V., Louie, S.G., Electronic transport in polycrystalline graphene. Nat. Mater. 9:10 (2010), 806–809.
    • (2010) Nat. Mater. , vol.9 , Issue.10 , pp. 806-809
    • Yazyev, O.V.1    Louie, S.G.2
  • 8
    • 77957593438 scopus 로고    scopus 로고
    • Geometry, mechanics, and electronics of singular structures and wrinkles in graphene
    • Pereira, V.M., Neto, A.C., Liang, H.Y., Mahadevan, L., Geometry, mechanics, and electronics of singular structures and wrinkles in graphene. Phys. Rev. Lett., 105(15), 2010, 156603.
    • (2010) Phys. Rev. Lett. , vol.105 , Issue.15
    • Pereira, V.M.1    Neto, A.C.2    Liang, H.Y.3    Mahadevan, L.4
  • 9
  • 10
    • 84902651780 scopus 로고    scopus 로고
    • Effect of Cu substrate roughness on growth of graphene domains at atmospheric pressure
    • Wang, B., Zhang, H.R., Zhang, Y.H., Chen, Z.Y., Jin, Z., Liu, X.Y., et al. Effect of Cu substrate roughness on growth of graphene domains at atmospheric pressure. Mater. Lett. 131 (2014), 138–140.
    • (2014) Mater. Lett. , vol.131 , pp. 138-140
    • Wang, B.1    Zhang, H.R.2    Zhang, Y.H.3    Chen, Z.Y.4    Jin, Z.5    Liu, X.Y.6
  • 11
    • 84878355361 scopus 로고    scopus 로고
    • High-strength chemical-vapor–deposited graphene and grain boundaries
    • Lee, G.H., Cooper, R.C., An, S.J., Lee, S., van der Zande, A., Petrone, N., et al. High-strength chemical-vapor–deposited graphene and grain boundaries. Science 340:6136 (2013), 1073–1076.
    • (2013) Science , vol.340 , Issue.6136 , pp. 1073-1076
    • Lee, G.H.1    Cooper, R.C.2    An, S.J.3    Lee, S.4    van der Zande, A.5    Petrone, N.6
  • 13
    • 85021212697 scopus 로고    scopus 로고
    • Targeted removal of copper foil surface impurities for improved synthesis of CVD graphene
    • Murdock, A.T., van Engers, C.D., Britton, J., Babenko, V., Meysami, S.S., Bishop, H., et al. Targeted removal of copper foil surface impurities for improved synthesis of CVD graphene. Carbon 122 (2017), 207–216.
    • (2017) Carbon , vol.122 , pp. 207-216
    • Murdock, A.T.1    van Engers, C.D.2    Britton, J.3    Babenko, V.4    Meysami, S.S.5    Bishop, H.6
  • 15
    • 79960926454 scopus 로고    scopus 로고
    • Impact of graphene interface quality on contact resistance and RF device performance
    • Hsu, A., Wang, H., Kim, K.K., Kong, J., Palacios, T., Impact of graphene interface quality on contact resistance and RF device performance. IEEE Electron. Device Lett. 32:8 (2011), 1008–1010.
    • (2011) IEEE Electron. Device Lett. , vol.32 , Issue.8 , pp. 1008-1010
    • Hsu, A.1    Wang, H.2    Kim, K.K.3    Kong, J.4    Palacios, T.5
  • 16
    • 85008490336 scopus 로고    scopus 로고
    • Understanding and controlling Cu-Catalyzed graphene nucleation: the role of impurities, roughness, and oxygen scavenging
    • Braeuninger-Weimer, P., Brennan, B., Pollard, A.J., Hofmann, S., Understanding and controlling Cu-Catalyzed graphene nucleation: the role of impurities, roughness, and oxygen scavenging. Chem. Mater. 28:24 (2016), 8905–8915.
    • (2016) Chem. Mater. , vol.28 , Issue.24 , pp. 8905-8915
    • Braeuninger-Weimer, P.1    Brennan, B.2    Pollard, A.J.3    Hofmann, S.4
  • 17
    • 84861691803 scopus 로고    scopus 로고
    • Tailoring electrical transport across grain boundaries in polycrystalline graphene
    • Tsen, A.W., Brown, L., Levendorf, M.P., Ghahari, F., Huang, P.Y., Havener, R.W., et al. Tailoring electrical transport across grain boundaries in polycrystalline graphene. Science 336:6085 (2012), 1143–1146.
    • (2012) Science , vol.336 , Issue.6085 , pp. 1143-1146
    • Tsen, A.W.1    Brown, L.2    Levendorf, M.P.3    Ghahari, F.4    Huang, P.Y.5    Havener, R.W.6
  • 18
    • 84859765689 scopus 로고    scopus 로고
    • Origin of the relatively low transport mobility of graphene grown through chemical vapor deposition
    • Song, H.S., Li, S.L., Miyazaki, H., Sato, S., Hayashi, K., Yamada, A., et al. Origin of the relatively low transport mobility of graphene grown through chemical vapor deposition. Sci. Rep., 2, 2012, 337.
    • (2012) Sci. Rep. , vol.2 , pp. 337
    • Song, H.S.1    Li, S.L.2    Miyazaki, H.3    Sato, S.4    Hayashi, K.5    Yamada, A.6
  • 19
    • 84979256249 scopus 로고    scopus 로고
    • Impurity-induced formation of bilayered graphene on copper by chemical vapor deposition
    • Li, J., Zhuang, J., Shen, C., Tian, Y., Que, Y., Ma, R., et al. Impurity-induced formation of bilayered graphene on copper by chemical vapor deposition. Nano Res. 9:9 (2016), 2803–2810.
    • (2016) Nano Res. , vol.9 , Issue.9 , pp. 2803-2810
    • Li, J.1    Zhuang, J.2    Shen, C.3    Tian, Y.4    Que, Y.5    Ma, R.6
  • 21
    • 85028618116 scopus 로고    scopus 로고
    • Contamination-free graphene by chemical vapor deposition in quartz furnaces
    • Lisi, N., Dikonimos, T., Buonocore, F., Pittori, M., Mazzaro, R., Rizzoli, R., et al. Contamination-free graphene by chemical vapor deposition in quartz furnaces. Sci. Rep., 7(1), 2017, 9927.
    • (2017) Sci. Rep. , vol.7 , Issue.1 , pp. 9927
    • Lisi, N.1    Dikonimos, T.2    Buonocore, F.3    Pittori, M.4    Mazzaro, R.5    Rizzoli, R.6
  • 23
    • 84958580613 scopus 로고    scopus 로고
    • Edge morphology evolution of graphene domains during chemical vapor deposition cooling revealed through hydrogenetching
    • Zhang, H., Zhang, Y., Zhang, Y., Chen, Z., Sui, Y., Ge, X., et al. Edge morphology evolution of graphene domains during chemical vapor deposition cooling revealed through hydrogenetching. Nanoscale 8:7 (2016), 4145–4150.
    • (2016) Nanoscale , vol.8 , Issue.7 , pp. 4145-4150
    • Zhang, H.1    Zhang, Y.2    Zhang, Y.3    Chen, Z.4    Sui, Y.5    Ge, X.6
  • 24
    • 84890832123 scopus 로고    scopus 로고
    • Edge-controlled growth and kinetics of single-crystal graphene domains by chemical vapor deposition
    • Ma, T., Ren, W., Zhang, X., Liu, Z., Gao, Y., Yin, L.C., et al. Edge-controlled growth and kinetics of single-crystal graphene domains by chemical vapor deposition. P. Natl. A Sci. 110:51 (2013), 20386–20391.
    • (2013) P. Natl. A Sci. , vol.110 , Issue.51 , pp. 20386-20391
    • Ma, T.1    Ren, W.2    Zhang, X.3    Liu, Z.4    Gao, Y.5    Yin, L.C.6
  • 25
    • 77957591886 scopus 로고    scopus 로고
    • An anisotropic etching effect in the graphene basal plane
    • Yang, R., Zhang, L., Wang, Y., Shi, Z., Shi, D., Gao, H., et al. An anisotropic etching effect in the graphene basal plane. Adv. Mater. 22:36 (2010), 4014–4019.
    • (2010) Adv. Mater. , vol.22 , Issue.36 , pp. 4014-4019
    • Yang, R.1    Zhang, L.2    Wang, Y.3    Shi, Z.4    Shi, D.5    Gao, H.6
  • 26
    • 84915807905 scopus 로고    scopus 로고
    • Interface engineering for CVD graphene: current status and progress
    • Wan, X., Chen, K., Xu, J., Interface engineering for CVD graphene: current status and progress. Small 10:22 (2014), 4443–4454.
    • (2014) Small , vol.10 , Issue.22 , pp. 4443-4454
    • Wan, X.1    Chen, K.2    Xu, J.3
  • 27
    • 84876069822 scopus 로고    scopus 로고
    • Enhancement of the electrical properties of graphene grown by chemical vapor deposition via controlling the effects of polymer residue
    • Suk, J.W., Lee, W.H., Lee, J., Chou, H., Piner, R.D., Hao, Y., et al. Enhancement of the electrical properties of graphene grown by chemical vapor deposition via controlling the effects of polymer residue. Nano Lett. 13:4 (2013), 1462–1467.
    • (2013) Nano Lett. , vol.13 , Issue.4 , pp. 1462-1467
    • Suk, J.W.1    Lee, W.H.2    Lee, J.3    Chou, H.4    Piner, R.D.5    Hao, Y.6
  • 28
    • 84856160788 scopus 로고    scopus 로고
    • Anisotropic hydrogen etching of chemical vapor deposited graphene
    • Zhang, Y., Li, Z., Kim, P., Zhang, L., Zhou, C., Anisotropic hydrogen etching of chemical vapor deposited graphene. ACS Nano 6:1 (2011), 126–132.
    • (2011) ACS Nano , vol.6 , Issue.1 , pp. 126-132
    • Zhang, Y.1    Li, Z.2    Kim, P.3    Zhang, L.4    Zhou, C.5
  • 29
    • 84895060561 scopus 로고    scopus 로고
    • The distribution of wrinkles and their effects on the oxidation resistance of chemical vapor deposition graphene
    • Zhang, Y.H., Wang, B., Zhang, H.R., Chen, Z.Y., Zhang, Y.Q., Sui, Y.P., et al. The distribution of wrinkles and their effects on the oxidation resistance of chemical vapor deposition graphene. Carbon 70 (2014), 81–86.
    • (2014) Carbon , vol.70 , pp. 81-86
    • Zhang, Y.H.1    Wang, B.2    Zhang, H.R.3    Chen, Z.Y.4    Zhang, Y.Q.5    Sui, Y.P.6
  • 30
    • 84947921491 scopus 로고    scopus 로고
    • Invisible growth of microstructural defects in graphene chemical vapor deposition on copper foil
    • Zhang, Y., Zhang, H., Li, F., Shu, H., Chen, Z., Sui, Y., et al. Invisible growth of microstructural defects in graphene chemical vapor deposition on copper foil. Carbon 96 (2016), 237–242.
    • (2016) Carbon , vol.96 , pp. 237-242
    • Zhang, Y.1    Zhang, H.2    Li, F.3    Shu, H.4    Chen, Z.5    Sui, Y.6
  • 31
    • 84920288507 scopus 로고    scopus 로고
    • Graphene CVD: interplay between growth and etching on morphology and stacking by hydrogen and oxidizing impurities
    • Choubak, S., Levesque, P.L., Gaufres, E., Biron, M., Desjardins, P., Martel, R., Graphene CVD: interplay between growth and etching on morphology and stacking by hydrogen and oxidizing impurities. J. Phys. Chem. C 118:37 (2014), 21532–21540.
    • (2014) J. Phys. Chem. C , vol.118 , Issue.37 , pp. 21532-21540
    • Choubak, S.1    Levesque, P.L.2    Gaufres, E.3    Biron, M.4    Desjardins, P.5    Martel, R.6
  • 33
    • 84964267422 scopus 로고    scopus 로고
    • Oxidative-etching-assisted synthesis of centimeter-sized single-crystalline graphene
    • Guo, W., Jing, F., Xiao, J., Zhou, C., Lin, Y., Wang, S., Oxidative-etching-assisted synthesis of centimeter-sized single-crystalline graphene. Adv. Mater. 28:16 (2016), 3152–3158.
    • (2016) Adv. Mater. , vol.28 , Issue.16 , pp. 3152-3158
    • Guo, W.1    Jing, F.2    Xiao, J.3    Zhou, C.4    Lin, Y.5    Wang, S.6
  • 34
    • 85017016559 scopus 로고    scopus 로고
    • Roles of oxygen and hydrogen in crystal orientation transition of copper foils for high-quality graphene growth
    • Hu, J., Xu, J., Zhao, Y., Shi, L., Li, Q., Liu, F., et al. Roles of oxygen and hydrogen in crystal orientation transition of copper foils for high-quality graphene growth. Sci. Rep., 7, 2017, 45358.
    • (2017) Sci. Rep. , vol.7 , pp. 45358
    • Hu, J.1    Xu, J.2    Zhao, Y.3    Shi, L.4    Li, Q.5    Liu, F.6
  • 35
    • 70349613432 scopus 로고    scopus 로고
    • Crystallographic tailoring of graphene by nonmetal SiOx nanoparticles
    • Gao, L., Ren, W., Liu, B., Wu, Z.S., Jiang, C., Cheng, H.M., Crystallographic tailoring of graphene by nonmetal SiOx nanoparticles. J. Am. Chem. Soc. 131:39 (2009), 13934–13936.
    • (2009) J. Am. Chem. Soc. , vol.131 , Issue.39 , pp. 13934-13936
    • Gao, L.1    Ren, W.2    Liu, B.3    Wu, Z.S.4    Jiang, C.5    Cheng, H.M.6
  • 36
    • 84984147403 scopus 로고
    • Thermal oxidation of silicon: growth mechanism and interface properties
    • Revesz, A.G., Thermal oxidation of silicon: growth mechanism and interface properties. Phys. Status Solidi 19:1 (1967), 193–202.
    • (1967) Phys. Status Solidi , vol.19 , Issue.1 , pp. 193-202
    • Revesz, A.G.1
  • 37
    • 84923451478 scopus 로고    scopus 로고
    • Direct observation of graphene growth and associated copper substrate dynamics by in situ scanning electron microscopy
    • Wang, Z.J., Weinberg, G., Zhang, Q., Lunkenbein, T., Klein-Hoffmann, A., Kurnatowska, M., et al. Direct observation of graphene growth and associated copper substrate dynamics by in situ scanning electron microscopy. ACS Nano 9:2 (2015), 1506–1519.
    • (2015) ACS Nano , vol.9 , Issue.2 , pp. 1506-1519
    • Wang, Z.J.1    Weinberg, G.2    Zhang, Q.3    Lunkenbein, T.4    Klein-Hoffmann, A.5    Kurnatowska, M.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.