MEMS sensors and wireless telemetry for distributed systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3328, Issue , 1998, Pages 112-123

  Britton Jr , Charles L ^a,b   Warmack, R J ^a,b   Smith, S F ^a,b   Oden, Patrick I ^a,b   Brown, Gilbert M ^a   Bryan, W L ^a   Clonts, Lloyd G ^a   Duncan, Michael G ^a   Emery, Mike S ^a   Ericson, M N ^a   Hu, Z ^b   Jones, Robert L ^b   Moore, Michael R ^a   Moore, J A ^a   Rochelle, Jim M ^b   Threatt, Timothy D ^b   Thundat, Thomas G ^a   Turner, Gary W ^a   Wintenberg, Alan L ^a,b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

CMOS; MEMS; Micro cantilevers; Sensors; Telemetry; Wireless

Indexed keywords

ATOMIC FORCE MICROSCOPY; BINARY SEQUENCES; CHEMICAL SENSORS; COMPOSITE MICROMECHANICS; CONCRETE BRIDGES; ELECTROMECHANICAL DEVICES; INTELLIGENT STRUCTURES; MEMS; MERCURY (METAL); MICROELECTROMECHANICAL DEVICES; MODULATION; NANOCANTILEVERS; SENSOR NETWORKS; SENSORS; TELEMETERING EQUIPMENT; THICKNESS MEASUREMENT; WIRELESS NETWORKS; WIRELESS SENSOR NETWORKS;

BIOLOGICAL SENSING; CHEMICAL SENSING; CMOS; DISTRIBUTED SYSTEMS; MECHANICAL DEVICES; MEMS PROCESS; MEMS SENSORS; MICRO-CANTILEVERS; MULTI PATH; MULTIPLE ACCESS (MAC); RF TELEMETRY; STANDARD CMOS; TELEMETRY; WIRELESS; WIRELESS TELEMETRY;

SECURITY OF DATA;

EID: 33748798893     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.320161     Document Type: Conference Paper

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