Infrared imaging using microcantilevers

American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC

Volumn 59, Issue , 1996, Pages 67-75

  Oden, Patrick I ^b   Datskos, Panos G ^b   Thundat, Thomas G ^a   Wachter, Eric A ^a   Warmack, Robert J ^b  

^a OAK RIDGE NATIONAL LABORATORY   (United States)

^b UNIVERSITY OF TENNESSEE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GOLD; INFRARED IMAGING; MICROELECTROMECHANICAL DEVICES; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR LASERS; SPURIOUS SIGNAL NOISE; THERMAL STRESS;

MICROCANTILEVERS;

INFRARED DETECTORS;

EID: 0030349509     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Article

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