Homogeneity Characterization of Lattice Spacing of Silicon Single Crystals

IEEE Transactions on Instrumentation and Measurement

Volumn 64, Issue 6, 2015, Pages 1692-1695

  Waseda, Atsushi ^a   Fujimoto, Hiroyuki ^a   Zhang, Xiao Wei ^b   Kuramoto, Naoki ^a   Fujii, Kenichi ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

^b HIGH ENERGY ACCELERATOR RESEARCH ORGANIZATION KEK   (Japan)

Author keywords

Avogadro constant; impurity; lattice comparator; lattice spacing; silicon single crystal

Indexed keywords

COMPARATORS (OPTICAL); CRYSTAL IMPURITIES; IMPURITIES; INGOTS; MONOCRYSTALLINE SILICON; SILICON; SILICON WAFERS;

AVOGADRO CONSTANT; LATTICE COMPARATORS; LATTICE SPACING; SILICON SINGLE CRYSTALS;

SINGLE CRYSTALS;

EID: 85027926430     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/TIM.2014.2383091     Document Type: Article

References (6)

1. 28Si crystal for a new kilogram definition," Metrologia, vol. 48, no. 2, pp. S1-S13, 2011.
2. -8," J. Appl. Crystallogr., vol. 36, pp. 188-192, Apr. 2003.
3. H. Fujimoto, A. Waseda, and X. W. Zhang, "Homogeneity characterization of lattice spacing of silicon single crystals by a self-referenced lattice comparator," Metrologia, vol. 48, no. 2, pp. S55-S61, 2011.
4. A. Waseda, H. Fujimoto, X. W. Zhang, N. Kuramoto, and K. Fujii, "Homogeneity characterization of lattice spacing of silicon single crystals," in Proc. Conf. Precis. Electromagn. Meas. (CPEM), Aug. 2014, pp. 400-401.
5. K. Nakayama and H. Fujimoto, "Progress in the measurement of lattice spacing d(220) of silicon," IEEE Trans. Instrum. Meas., vol. 46, no. 2, pp. 580-583, Apr. 1997.
6. K. Fujii et al., "Present State of the Avogadro constant determination from silicon crystals with natural isotopic compositions," IEEE Trans. Instrum. Meas., vol. 54, no. 2, pp. 854-859, Apr. 2005.