Progress in the measurement of lattice spacing d(220) of silicon

IEEE Transactions on Instrumentation and Measurement

Volumn 46, Issue 2, 1997, Pages 580-583

  Nakayama, Kan ^a   Fujimoto, Hiroyuki ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Avogadro constant; Lattice spacing; Silicon; X ray interferometer; XRCD method

Indexed keywords

CARBON; CRYSTAL LATTICES; INTERFEROMETRY; OXYGEN;

AVOGADRO'S CONSTANT; LATTICE SPACING; OPTICAL INTERFEROMETRY; X RAY CRYSTAL DENSITY (XRCD) METHOD; X RAY INTERFEROMETRY;

SILICON;

EID: 0031120379     PISSN: 00189456     EISSN: None     Source Type: Journal    
DOI: 10.1109/19.571922     Document Type: Article

References (19)

1. R. D. Deslattes and A. Henins, "X-ray to visible wavelength rations," Phys. Rev. Lett., vol. 31, pp. 972-975, Oct. 1973.
2. P. Becker, K. Dorenwendt, G. Ebeling, R. Lauer, W. Lucas, R. Probst, H.-J. Rademacher, G. Reim, P. Seyfried, and H. Siegert, "Absolute determination of the (220) lattice spacing in a silicon crystal," Phys. Rev. Lett., vol. 46, pp. 1540-1543, June 1981.
3. G. Basile, A. Bergamin, G. Cavagnero, G. Mana, E. Vittone, and G. Zosi, "The (220) Lattice Spacing of Silicon," IEEE Trans. Instrum. Meas., vol. 44, no. 2, pp. 526-537, 1995.
4. R. D. Deslattes, A. Henins, R. M. Schoonover, C. L. Carrol, and H. A. Bowman, "Determination of the Avogadro constant," Phys. Rev. Lett., vol. 33, pp. 463-466, Aug. 1974.
5. _, "Avogadro constant - Corrections to an earlier report," Phys. Rev. Lett., vol. 36, no. 15, pp. 898-900, 1976.
6. P. Seyfried, P. Becker, A. Kozdon, F. Ldicke, F. Spieweck, J. Stumpel, H. Wagenbreth, D. Windisch, P. De Bivre, H. H. Ku, G. Lenaers, T. J. Murphy, H. S. Peiser, and S. Valkiers, "A determination of the Avogadro constant," Z. Phys., vol. 87, no. 3, pp. 289-298, 1992.
7. G. Basile, P. Becker, A. Bergamin, H. Bettin, G. Cavagnero, P. De Bivre, U. Ktgens, G. Mana, M. Mosca, B. Pajot, R. Panciera, W. Pasin, S. Pettorruso, A. Peuto, A. Sacconi, J. Stumpel, S. Valkiers, E. Vittone, and G. Zosi, "A new determination of NA," IEEE Trans. Instrum. Meas., vol. 44, no. 2, pp. 538-541, 1995.
8. K. Fujii, M. Tanaka, Y. Nezu, A. Sakuma, A. Leistner, and W. Giardini, "Absolute measurement of the density of silicon crystals in vacuo for a determination of the Avogadro constant," IEEE Trans. Instrum. Meas., vol. 44, no. 2. pp. 542-545, 1995.
9. P. De Bivre, S. Valkiers, S. Peiser, F. Spieweck, H. Bettin, A. Peuto, A. Sacconi, M. Mosca, K. Fujii, M. Tanaka, and Y. Nezu, in Digest of 1994 Conference Precision Electromagnetic Measurements, E. Deweese and G. Bennett, Eds. Boulder, CO: National Instit. Standards and Technology, 1994, p. 343.
10. H. Fujimoto, K. Nakayama, M. Tanaka, and G. Misawa, "Absolute measurement of lattice spacing d(220) in floating zone silicon crystal," J. Appl. Phys., vol. 34, no. 9, pp. 5065-5069, 1995.
11. H. Fujimoto, M. Tanaka, and K. Nakayama, "Noise reduction in an optical interferometer for picometer measurements," IEEE Trans. Instrum. Meas., vol. 44, pp. 471-474, Apr. 1995.
12. M. Okaji and H. Imai, "High precision dilatometer by means of optical heterodyne interferometry," Netsu Bussei, vol. 6, no. 2, pp. 83-88, 1992 (in Japanese).
13. A. Accotto, E. Vittone, and G. Zosi, "A study of symmetrical LLL X-ray polylithic interferometers on the basis of the Takagi equations," Z. Phys., vol. 95, no. 2, pp. 151-165, 1994.
14. G. Mana, "Diffraction effects in optical interferometers illuminated by laser sources," Metrologia, vol. 26, pp. 87-93, June 1989.
15. A. Bergamin, G. Cavagnero, and G. Mana, "Observation of Fresnel diffraction in a two-beam laser interferometer," Phys. Rev., vol. 49, no. 3, pp. 2167-2173, 1994.
16. D. Windisch and P. Becker, "Silicon lattice parameters as an absolute scale of length for high precision measurements of fundamental constants," Phys. Stat. Sol., vol. 118, no. 2, pp. 379-388, 1990.
17. D. Windisch and P. Becker, "Lattice distortion induced by carbon in silicon," Philos. Mag., vol. 58, no. 2, pp. 435-443, 1988.
18. P. Becker, P. Seyfried, and H. Siegert, "The lattice parameter of highly pure silicon single crystals," Z. Phys., vol. 48, pp. 17-21, Jan. 1982.
19. T. Abe and M. Kimura, "Behavior of point defects in FZ silicon crystals," in Semiconductor Silicon, H. R. Huff, K. Barrackough, and J. Chikawa, Eds. Pennington, NJ: Electrochemical Soc., 1990, pp. 105-116.