Optimization of a VOC sensor with a bilayered diaphragm using FBAR as strain sensing elements

Sensors (Switzerland)

Volumn 17, Issue 8, 2017, Pages

  Guo, Huihui ^a   Guo, Aohui ^b   Gao, Yang ^c   Liu, Tingting ^a  

^a SOUTHWEST UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^b Tibet Agriculture Animal Husbandry University   (China)

^c RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Bilayered diaphragm; FBAR; FEA; VOC sensor

Indexed keywords

ACOUSTIC RESONATORS; ACOUSTIC SURFACE WAVE FILTERS; EQUIVALENT CIRCUITS; FINITE ELEMENT METHOD; NITRIDES; SILICON NITRIDE; SILICON OXIDES; VOLATILE ORGANIC COMPOUNDS;

ALUMINUM NITRIDE FILMS; BILAYERED; EQUIVALENT CIRCUIT MODEL; FBAR; FILM BULK ACOUSTIC RESONATORS; MECHANICAL DEFORMATION; VOC SENSOR; VOLATILE ORGANIC COMPOUND (VOC);

DIAPHRAGMS;

EID: 85026800365     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s17081764     Document Type: Article

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