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Volumn 155, Issue 2, 2011, Pages 519-523
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Detection of ethanol and methanol vapors using polymer-coated piezoresistive Si bridge
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Author keywords
Alcohol vapor sensor; Epoxy acrylate; Si bridge; Swelling effect
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Indexed keywords
ALCOHOL VAPOR SENSORS;
ALCOHOL VAPORS;
AMBIENT AIR;
ELASTIC MECHANICS THEORY;
EPOXY ACRYLATE;
ETHANOL VAPOR;
GAS LOAD;
LOW COSTS;
MEMS PROCESS;
METHANOL VAPORS;
OUTPUT VOLTAGES;
PIEZO-RESISTIVE;
POLYMER LAYERS;
REPRODUCIBILITIES;
SI BRIDGE;
SIGNAL PROCESSING CIRCUITS;
SWELLING EFFECT;
THEORETICAL MODELS;
THIN POLYMER LAYERS;
THIN POLYMERS;
WHEATSTONE BRIDGES;
BRIDGE CIRCUITS;
ETHANOL;
METHANOL;
PLASTIC COATINGS;
POLYMER FILMS;
POLYMERS;
SENSORS;
SIGNAL PROCESSING;
SILICON;
VAPORS;
CABLE STAYED BRIDGES;
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EID: 79957839854
PISSN: 09254005
EISSN: None
Source Type: Journal
DOI: 10.1016/j.snb.2010.12.056 Document Type: Article |
Times cited : (22)
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References (13)
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