FBAR-on-diaphragm type electro-acoustic resonant micro-accelerometer: a theoretical study

Microsystem Technologies

Volumn 22, Issue 7, 2016, Pages 1575-1583

  Gao, Yang ^a   He, Wan jing ^b   Li, Jun ru ^c   Huang, Zhen hua ^d  

^a RESEARCH CENTER OF LASER FUSION   (China)

^b SOUTHWEST UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

^c CHONGQING UNIVERSITY   (China)

^d BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELERATION; ACCELEROMETERS; ALUMINUM NITRIDE; COMPUTER SOFTWARE; DIAPHRAGMS; FINITE ELEMENT METHOD; FREQUENCY SHIFT KEYING; MODAL ANALYSIS; NATURAL FREQUENCIES; SILICON; SILICON OXIDES; WAVE PROPAGATION; ZINC SULFIDE;

ACCELERATION SENSING; FINITE ELEMENT MODAL ANALYSIS; FIRST PRINCIPLE METHOD; LONGITUDINAL WAVE VELOCITY; MICRO ACCELEROMETERS; PERFORMANCE ANALYSIS; QUALITATIVE ANALYSIS; TEMPERATURE STABILITY;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 84953242616     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-015-2779-x     Document Type: Article

References (8)

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