Microstrip phase shifter using actuating ground plane membrane

Antem 2002 - International Symposium on Antenna Technology and Applied Electromagnetics, Conference Proceedings

Volumn , Issue , 2002, Pages

  Shafai, C ^a   Sharma, S ^a   Shafai, L ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; MICROSTRIP LINES; PHASE SHIFT; PHASE SHIFTERS; SILICON WAFERS;

BACK-SIDE ETCHING; CORRUGATION PITCHES; MICROMACHINING TECHNIQUES; MICROSTRIP PHASE SHIFTER; MICROSTRIP TRANSMISSION LINES; SILICON SUBSTRATES; SURFACE CORRUGATIONS; TRANSMITTED SIGNAL;

MEMBRANES;

EID: 85016834060     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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7. E.H. Yang, S.S. Yang and O.C. Jeong, "Fabrication and Electrostatic Actuation of Thin Diaphragms", KSME International Journal, vol. 12 (2), 161-169, 1998.