Fabrication and electrostatic actuation of thin diaphragms

KSME International Journal

Volumn 12, Issue 2, 1998, Pages 161-169

  Yang, E H ^a  

^a Ajou University   (South Korea)

Author keywords

Corrugated Diaphragm; Damping; Dynamic Testing; Electrostatic Actuation; P+ Diaphragm; Residual Stress

Indexed keywords

EID: 0003371071     PISSN: 12264865     EISSN: None     Source Type: Journal    
DOI: 10.1007/BF02947160     Document Type: Article

References (2)

1. + Silicon Diaphragms," Tech. Digest, IEEE Transducers '91, pp. 93-96.
2. + Silicon Films," Proc., IEEE Transducers '89, Vol. 2, pp. 866-871.