Corrugated micromachined membrane structures

Canadian Conference on Electrical and Computer Engineering

Volumn 1, Issue , 2002, Pages 445-449

  Chrusch, Dwayne D ^a   Shafai, C ^a  

^a UNIVERSITY OF MANITOBA   (Canada)

Author keywords

Membrane; MEMS; Micromachining; XeF2

Indexed keywords

COPPER; ELECTRIC POTENTIAL; ELECTROSTATICS; ETCHING; EVAPORATION; MEMBRANES; MICROELECTRONIC PROCESSING; MICROMACHINING; NANOTECHNOLOGY; POTASSIUM COMPOUNDS; SEMICONDUCTING SILICON; SUBSTRATES;

RADIAL SURFACES;

THIN FILMS;

EID: 0036067591     PISSN: 08407789     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. The design, fabrication, and testing of corrugated silicon nitride diaphragms
2. Large deflection performance of surface micromachined corrugated diaphragms
3. The fabrication and use of micromachined corrugated silicon diaphragms
4. Fabrication of a thermopneumatic microactuator with a corrugated p+ silicon diaphragm
5. Fabrication and dynamic testing of electrostatic actuators with p+ silicon diaphragms
6. Fabrication and electostatic actuation of thin diaphragms