Development of vacuum arc ion sources for heavy ion accelerator injectors and ion implantation technology (invited)

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 776-781

  Oks, Efim M ^a  

^a TOMSK STATE UNIVERSITY OF CONTROL SYSTEMS AND RADIOELECTRONICS   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85011926472     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148533     Document Type: Conference Paper

References (46)

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