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Volumn 67, Issue 3, 1996, Pages 1213-1215
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Vacuum arc gas/metal ion sources with a magnetic field
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Author keywords
BEAM EXTRACTION; ELECTRIC ARCS; ION SOURCES; KEV RANGE; MAGNETIC FIELDS; METALS; MILLI AMP BEAM CURRENTS; RARE GASES
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Indexed keywords
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EID: 0004794286
PISSN: 00346748
EISSN: 10897623
Source Type: Journal
DOI: 10.1063/1.1146735 Document Type: Conference Paper |
Times cited : (15)
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References (9)
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