The insertion of a small Mevva source inside an electron cyclotron resonance: Status report

Review of Scientific Instruments

Volumn 67, Issue 3, 1996, Pages 1207-1209

  Cavenago, M ^a   Vassiliev, A ^b  

^a LABORATORI NAZIONALI DI LEGNARO   (Italy)

^b INSTITUTE FOR THEORETICAL AND EXPERIMENTAL PHYSICS   (Russian Federation)

Author keywords

AMP BEAM CURRENTS; DESIGN; ION SOURCES; METALS; OPTIMIZATION; SPUTTERING

Indexed keywords

EID: 85024792459     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1146733     Document Type: Conference Paper

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