Hybrid micro-optical sensors via sol-gel soft lithography

Materials Research Society Symposium - Proceedings

Volumn 628, Issue , 2000, Pages CC9.3.1-CC9.3.6

  Clarner, Mark A ^a   Lochhead, Michael J ^a  

^a UNIVERSITY OF NEW HAMPSHIRE   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 85009902070     PISSN: 02729172     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (19)

1. Materials for mechanical and optical microsystems
2. Sol-gel optics IV