Long throw linear magnetic actuators stackable to one millimeter of structural height

Microsystem Technologies

Volumn 4, Issue 4, 1998, Pages 180-183

  Fischer, K ^a   Guckel, H ^a  

^a University of Wisconsin Madison   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0005145610     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s005420050126     Document Type: Article

References (5)

1. Becker EW; Ehrfeld W; Hagmann P; Maner A; Münchmeyer D: (1986), Fabrication of Microstructures with High Aspect Ratios and Great Structural Heights by Synchrotron Radiation Lithography, Galvanoforming, and Plastic Moulding (LIGA Process), Microelectronic Engineering, vol. 4, 1986, 35-56
2. Earles T; Mangat P; Klein J; Guckel H: (1996), Magnetic Microactuators for Relay Applications, Actuator '96, Bremen, 26-28 June, 1996
3. Guckel H; Skrobis K; Klein J; Christenson T; Wiegele T: (1993), Deep X-ray Lithography for Micromechanics, Proc. SPIE's Int. Symp. on Holography, Microstructures and Laser Technologies, Quebec City, Canada, August 5-21, 290-297
4. Guckel H; et al.: (1996a), Advances in Photoresist Based Processing Tools For 3-Dimensional Precision and Micro Mechanics, 1996 Solid-State Sensor and Actuator Workshop, Hilton Head Island, NC, 2-6 June 1996
5. Guckel H; Earles T; Klein J; Zook J; Ohnstein T: (1996b), Electromagnetic Linear Actuators with Inductive Position Sensing, Sensors and Actuators, A 53, 1996, 386-391