A 20-40 GHz tunable MEMS bandpass filter with enhanced stability by gold-vanadium micro-corrugated diaphragms

IEEE MTT-S International Microwave Symposium Digest

Volumn 2016-August, Issue , 2016, Pages

  Yang, ZhengAn ^a   Peroulis, Dimitrios ^a  

^a PURDUE UNIVERSITY   (United States)

Author keywords

creep resistant; MEMS; stability; thin film; tunable filter

Indexed keywords

BANDWIDTH; CONVERGENCE OF NUMERICAL METHODS; CREEP; DIAPHRAGMS; ECONOMIC AND SOCIAL EFFECTS; ELECTROMECHANICAL FILTERS; FREQUENCY STABILITY; MEMS; MICROWAVE FILTERS; STABILITY; THIN FILMS; TUNERS;

CORRUGATED DIAPHRAGM; CREEP RESISTANT; ENHANCED STABILITY; FILTER COMPONENTS; FRACTIONAL BANDWIDTHS; MEMS TUNABLE FILTERS; SILICON MICROMACHINING; TUNABLE FILTERS;

BANDPASS FILTERS;

EID: 84985021927     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2016.7540061     Document Type: Conference Paper

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