A new method of fixing high-aspect-ratio microstructures by gel

Micromachines

Volumn 7, Issue 7, 2016, Pages

  Chen, Nan ^a   Chen, Xiangyu ^a   Xiong, Penghui ^a   Hou, Shuangyue ^a   Zhang, Xiaobo ^a   Xiong, Ying ^a   Liu, Gang ^a   Tian, Yangchao ^a  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Fix; Gel; High aspect ratio microstructures

Indexed keywords

DEFECTS; GELS; LIQUIDS; MICROSTRUCTURE;

CAPILLARY FORCE; EXAMINATION PROCESS; HIGH ASPECT RATIO MICROSTRUCTURES; LIQUID DRYING; MICROFABRICATION PROCESS; PATTERN DEFECTS; PROCESS PARAMETERS; WHOLE PROCESS;

ASPECT RATIO;

EID: 84982863789     PISSN: None     EISSN: 2072666X     Source Type: Journal    
DOI: 10.3390/mi7070115     Document Type: Article

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