Quantum electromechanics on silicon nitride nanomembranes

Nature Communications

Volumn 7, Issue , 2016, Pages

  Fink, J M ^a,b,e   Kalaee, M ^a,b   Pitanti, A ^a,b,f   Norte, R ^a,b,g   Heinzle, L ^c   Davanco M ^d   Srinivasan, K ^d   Painter, O ^a,b  

^a California Institute of Technology   (United States)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

^c ETH ZURICH   (Switzerland)

^d NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^e INSTITUTE OF SCIENCE AND TECHNOLOGY AUSTRIA   (Austria)

^f SCUOLA NORMALE SUPERIORE   (Italy)

^g DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

NANOMATERIAL; QUANTUM DOT; SILICON NITRIDE;

ELECTRONIC EQUIPMENT; EXPERIMENTAL STUDY; INORGANIC COMPOUND; LIGHT; MEMBRANE; MICROWAVE RADIATION; NANOPARTICLE; QUANTUM MECHANICS; SILICON; SUPERCONDUCTIVITY;

ARTICLE; COOLING; ELECTRIC FIELD; EXCITATION CONTRACTION COUPLING; MEMBRANE; MICROWAVE RADIATION; NANOMEMBRANE; NANOTECHNOLOGY; PHONON; PHOTON; QUANTUM MECHANICS; THERMOMETRY; VACUUM;

EID: 84982731572     PISSN: None     EISSN: 20411723     Source Type: Journal    
DOI: 10.1038/ncomms12396     Document Type: Article

References (55)

1. Norcada Inc.http://www.norcada.com/.
2. Cohen, J. D., Meenehan, S. M., Painter, O. Optical coupling to nanoscale optomechanical cavities for near quantum-limited motion transduction. Opt. Express 21, 11227-11236 (2013).
3. Yu, S.-P. et al. Nanowire photonic crystal waveguides for single-atom trapping and strong light-matter interactions. Appl. Phys. Lett. 104, 111103 (2014).
4. Liu, X. et al. Amorphous solid without low energy excitations. Phys. Rev. Lett. 78, 4418-4421 (2009).
5. Unterreithmeier, Q. P., Faust, T., Kotthaus, J. P. Damping of nanomechanical resonators. Phys. Rev. Lett. 105, 027205 (2010).
6. Yu, P.-L., Purdy, T. P., Regal, C. A. Control of material damping in high-q membrane microresonators. Phys. Rev. Lett. 108, 083603 (2012).
7. Yuan, M., Singh, V., Blanter, Y. M., Steele, G. A. Large cooperativity and microkelvin cooling with a three-dimensional optomechanical cavity. Nat. Commun. 6, 8491 (2015).
8. Wilson, D. J., Regal, C. A., Papp, S. B., Kimble, H. J. Cavity optomechanics with stoichiometric SiN Films. Phys. Rev. Lett. 103, 207204 (2009).
9. Yuan, M., Cohen, M. A., Steele, G. A. Silicon nitride membrane resonators at millikelvin temperatures with quality factors exceeding 108. arXiv:1510.07468 (2015).
10. Barclay, P. E., Srinivasan, K., Painter, O., Lev, B., Mabuchi, H. Integration of fiber-coupled high-q sinx microdisks with atom chips. App. Phys. Lett. 89, 131108 (2006).
11. Aspelmeyer, M., Kippenberg, T. J., Marquardt, F. Cavity optomechanics. Rev. Mod. Phys. 86, 1391-1452 (2014).
12. Thompson, J. D. et al. Strong dispersive coupling of a high-finesse cavity to a micromechanical membrane. Nature 452, 72-75 (2008).
13. Peterson, R. W. et al. Laser cooling of a micromechanical membrane to the quantum backaction limit. Phys. Rev. Lett. 116, 063601 (2016).
14. Underwood, M. et al. Measurement of the motional sidebands of a nanogramscale oscillator in the quantum regime. Phys. Rev. A 92, 061801 (R) (2015).
15. Purdy, T. P., Peterson, R. W., Regal, C. A. Observation of radiation pressure shot noise on a macroscopic object. Science 339, 801-804 (2013).
16. Purdy, T. P., Yu, P.-L., Peterson, R. W., Kampel, N. S., Regal, C. A. Strong optomechanical squeezing of light. Phys. Rev. X 3, 031012 (2013).
17. Rews, R. W. et al. Bidirectional and efficient conversion between microwave and optical light. Nat. Phys. 10, 321-326 (2014).
18. Eichenfield, M., Camacho, R., Chan, J., Vahala, K. J., Painter, O. A picogram-and nanometre-scale photonic-crystal optomechanical cavity. Nature 459, 550-555 (2009).
19. Anetsberger, G. et al. Near-field cavity optomechanics with nanomechanical oscillators. Nat. Phys. 5, 909-914 (2009).
20. Eichenfield, M., Chan, J., Camacho, R. M., Vahala, K. J., Painter, O. Optomechanical crystals. Nature 462, 78-82 (2009).
21. Grutter, K. E., Davanco, M. I., Srinivasan, K. Slot-mode optomechanical crystals: a versatile platform for multimode optomechanics. Optica 2, 994-1001 (2015).
22. Camacho, R. M., Chan, J., Eichenfield, M., Painter, O. Characterization of radiation pressure and thermal effects in a nanoscale optomechanical cavity. Opt. Express 17, 15726-15735 (2009).
23. Davanço, M., Chan, J., Safavi-Naeini, A. H., Painter, O., Srinivasan, K. Slot-mode-coupled optomechanical crystals. Opt. Express 20, 24394-24410 (2012).
24. Regal, C. A., Lehnert, K. W. From cavity electromechanics to cavity optomechanics. J. Phys. Conf. Ser. 264, 012025 (2011).
25. Safavi-Naeini, A. H., Painter, O. Proposal for an optomechanical traveling wave phononphoton translator. New J. Phys. 13, 013017 (2011).
26. Barzanjeh, S., Abdi, M., Milburn, G. J., Tombesi, P., Vitali, D. Reversible optical-to-microwave quantum interface. Phys. Rev. Lett. 109, 130503 (2012).
27. Bochmann, J., Vainsencher, A., Awschalom, D. D., Cleland, A. N. Nanomechanical coupling between microwave and optical photons. Nat. Phys. 9, 712-716 (2013).
28. Bagci, T. et al. Optical detection of radio waves through a nanomechanical transducer. Nature 507, 81-85 (2014).
29. COMSOL Multiphysics 3.5 http://www.comsol.com
30. Sonnet Software Inc.http://www.sonnetsoftware.com
31. Mohan, S., del Mar Hershenson, M., Boyd, S., Lee, T. Simple accurate expressions for planar spiral inductances. Solid-State Circ. IEEE J. 34, 1419-1424 (1999).
32. Teufel, J. D. et al. Sideband cooling of micromechanical motion to the quantum ground state. Nature 475, 359-363 (2011).
33. Pitanti, A. et al. Strong opto-electro-mechanical coupling in a silicon photonic crystal cavity. Opt. Express 23, 3196-3208 (2015).
34. Hill, J. T., Safavi-Naeini, A. H., Chan, J., Painter, O. Coherent optical wavelength conversion via cavity optomechanics. Nat. Commun. 3, 1196 (2012).
35. Lecocq, F., Clark, J. B., Simmonds, R. W., Aumentado, J., Teufel, J. D. Mechanically mediated microwave frequency conversion in the quantum regime. Phys. Rev. Lett. 116, 043601 (2016).
36. Weis, S. et al. Optomechanically Induced Transparency. Science 330, 1520-1523 (2010).
37. Safavi-Naeini, A. H. et al. Electromagnetically induced transparency and slow light with optomechanics. Nature 472, 69-73 (2011).
38. Teufel, J. D. et al. Circuit cavity electromechanics in the strong-coupling regime. Nature 471, 204-208 (2011).
39. Dobrindt, J. M., Kippenberg, T. J. Theoretical analysis of mechanical displacement measurement using a multiple cavity mode transducer. Phys. Rev. Lett. 104, 033901 (2010).
40. Yan, G.-Z., Chan, P. C., Hsing, &I.-M., Sharma, R. K., Sin, J. in Proceedings IEEE Thirteenth Annual International Conference on Micro Electro Mechanical Systems 562-567 (Miyazaki, Japan, 2000).
41. Fujitsuka, N., Hamaguchi, K., Funabashi, H., Kawasaki, E., Fukada, T. Aluminum protected silicon anisotropic etching technique using tmah with an oxidizing agent and dissolved Si. R&D. Rev. Toyota CRDL 39, 34-42 (2004).
42. Teufel, J. D., Harlow, J. W., Regal, C. A., Lehnert, K. W. Dynamical backaction of microwave fields on a nanomechanical oscillator. Phys. Rev. Lett. 101, 197203 (2008).
43. Marquardt, F., Chen, J. P., Clerk, A. A., Girvin, S. M. Quantum theory of cavity-assisted sideband cooling of mechanical motion. Phys. Rev. Lett. 99, 093902 (2007).
44. Sarabi, B., Ramanayaka, A. N., Burin, A. L., Wellstood, F. C., Osborn, K. D. Spectroscopy of random two-level systems in insulating films. arXiv:1501.05865 (2015).
45. Dobrindt, J. M., Wilson-Rae, I., Kippenberg, T. J. Parametric normal-mode splitting in cavity optomechanics. Phys. Rev. Lett. 101, 263602 (2008).
46. Rocheleau, T. et al. Preparation and detection of a mechanical resonator near the ground state of motion. Nature 463, 72-75 (2010).
47. Safavi-Naeini, A. H. et al. Laser noise in cavity-optomechanical cooling and thermometry. New J. Phys. 15, 035007 (2013).
48. Wollman, E. E. et al. Quantum squeezing of motion in a mechanical resonator. Science 349, 952-955 (2015).
49. Pirkkalainen, J. M., Dams Damskägg, E., Brandt, M., Massel, F., Sillanpaä, M. A. Squeezing of quantum noise of motion in a micromechanical resonator. Phys. Rev. Lett. 115, 243601 (2015).
50. Blais, A. et al. Quantum-information processing with circuit quantum electrodynamics. Phys. Rev. A 75, 032329 (2007).
51. Grabovskij, G. J., Peichl, T., Lisenfeld, J., Weiss, G., Ustinov, A. V. Strain tuning of individual atomic tunneling systems detected by a superconducting qubit. Science 338, 232-234 (2012).
52. Schuster, D. I. et al. AC Stark shift and dephasing of a superconducting qubit strongly coupled to a cavity field. Phys. Rev. Lett. 94, 123602 (2005).
53. Safavi-Naeini, A. H., Painter, O. Design of optomechanical cavities and waveguides on a simultaneous bandgap phononic-photonic crystal slab. Opt. Express 18, 14926-14943 (2010).
54. Gustafsson, M. V. et al. Propagating phonons coupled to an artificial atom. Science 346, 207-211 (2014).
55. Habraken, S. J. M., Stannigel, K., Lukin, M. D., Zoller, P., Rabl, P. Continuous mode cooling and phonon routers for phononic quantum networks. New J. Phys. 14, 115004 (2012).