Zirconium doped TiO 2 thin films deposited by chemical spray pyrolysis

Applied Surface Science

Volumn 387, Issue , 2016, Pages 539-545

  Juma, A ^a,b   Oja Acik, I ^a   Oluwabi, A T ^a   Mere, A ^a   Mikli, V ^a   Danilson, M ^a   Krunks, M ^a  

^a TALLINN UNIVERSITY OF TECHNOLOGY   (Estonia)

^b BOTSWANA INTERNATIONAL UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Botswana)

Author keywords

Chemical spray pyrolysis; Dielectric properties; Thin films; TiO 2; Zr doping

Indexed keywords

ACETONE; CHEMICAL BONDS; CRACKING (CHEMICAL); DEPOSITION; DIELECTRIC PROPERTIES; DIELECTRIC PROPERTIES OF SOLIDS; ENERGY GAP; HIGH-K DIELECTRIC; SEMICONDUCTOR DOPING; SPRAY PYROLYSIS; THIN FILMS; TITANIUM DIOXIDE;

CHEMICAL SPRAY PYROLYSIS; DEPOSITION TECHNIQUE; DIFFERENT PROPORTIONS; PRECURSOR SOLUTIONS; ROOT MEAN SQUARE ROUGHNESS; TIO2; ZIRCONIUM ACETYLACETONATE; ZR-DOPING;

ZIRCONIUM COMPOUNDS;

EID: 84977100510     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2016.06.093     Document Type: Article

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