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Volumn 49, Issue 8, 2008, Pages 1900-1904
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Optimization of Zr-doped ZnO thin films prepared by sol-gel method
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Author keywords
Oxide semiconductors; Sol gel method; Thin films; Zinc oxide; Zirconium doping
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Indexed keywords
CLADDING (COATING);
COLLOIDS;
CONCENTRATION (PROCESS);
DRAIN CURRENT;
GELATION;
GELS;
METALLIC FILMS;
OPTICAL DESIGN;
OPTICAL FILMS;
OPTICAL PROPERTIES;
SEMICONDUCTING CADMIUM TELLURIDE;
SEMICONDUCTING ZINC COMPOUNDS;
SOL-GEL PROCESS;
SOL-GELS;
SOLIDS;
SOLS;
SPIN COATING;
SPIN DYNAMICS;
SPIN GLASS;
THICK FILMS;
THIN FILM DEVICES;
THIN FILM TRANSISTORS;
THIN FILMS;
TRANSISTORS;
VAPOR DEPOSITION;
ZINC ALLOYS;
ZINC OXIDE;
ZIRCONIUM;
ACTIVE CHANNELS;
AS-DEPOSITED FILMS;
CRYSTALLINITY;
DEPLETION MODES;
GLASS SUBSTRATES;
GRAIN SIZES;
OXIDE SEMICONDUCTORS;
RMS ROUGHNESS;
SEMICONDUCTOR THIN FILMS;
SOL-GEL METHOD;
SOL-GEL METHODS;
SPIN COATINGS;
ZIRCONIUM DOPING;
ZNO THIN FILMS;
FILM PREPARATION;
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EID: 52449089670
PISSN: 13459678
EISSN: None
Source Type: Journal
DOI: 10.2320/matertrans.MER2008111 Document Type: Article |
Times cited : (42)
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References (26)
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