Translation-Invariant Multiscale Energy-Based PCA for Monitoring Batch Processes in Semiconductor Manufacturing

IEEE Transactions on Automation Science and Engineering

Volumn 14, Issue 2, 2017, Pages 894-904

  Rato, Tiago J ^a   Blue, Jakey ^b   Pinaton, Jacques ^c   Reis, Marco S ^a  

^a UNIVERSITY OF COIMBRA   (Portugal)

^b ECOLE DES MINES DE SAINT ETIENNE   (France)

^c STMICROELECTRONICS   (France)

Author keywords

Batch process monitoring; energy; fault detection and classification (FDC); translation invariant wavelet decomposition

Indexed keywords

BATCH DATA PROCESSING; FAULT DETECTION; FREQUENCY DOMAIN ANALYSIS; MANUFACTURE; PARAMETER ESTIMATION; PROCESS CONTROL; PROCESS MONITORING; SEMICONDUCTOR DEVICE MANUFACTURE; WAVELET DECOMPOSITION;

OPERATIONAL SIGNATURES; ROOT CAUSE ANALYSIS; SEMICONDUCTOR MANUFACTURING; STATE-OF-THE-ART APPROACH; TIME FREQUENCY DOMAIN; TIME VARYING CONDITIONS; TRANSLATION INVARIANT WAVELETS; TRANSLATION INVARIANTS;

PRINCIPAL COMPONENT ANALYSIS;

EID: 84964585423     PISSN: 15455955     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASE.2016.2545744     Document Type: Article

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