Design and fabrication of RF MEMS capacitive switch on silicon substrate with advanced IC interconnect technology

2001 6th International Conference on Solid-State and Integrated Circuit Technology, ICSICT 2001 - Proceedings

Volumn 2, Issue , 2001, Pages 739-741

  Chen, Zhen ^a   Yu, Mingbin ^a   Guo, Lihui ^a  

^a INSTITUTE OF MICROELECTRONICS   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84964444006     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSICT.2001.982000     Document Type: Conference Paper

References (11)

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3. Duffy S., Bozle C., Rabe S., Knecht J., Travis L., Wyatt P., Keast C., Gouker M., MEMS microswitches for reconfigurable microwave circuitry, Microwave and Wireless Components Letters, IEEE, Volume: 11 Issue: 3, March 2001, pp. 106-108.
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7. Yao Z.J, Chen S., Eshelman S., Denniston D., Goldsmith C., Micromachined Low-Loss Microwave Switches, IEEE Journal of Microelectromechanical Systems, Vol. 8, No. 2, June 1999, pp. 129-134.
8. Goldsmith C.L., Yao Z., Eshelman S., Denniston D., Performance Of Low-Loss RF MEMS Capacitive Switches, IEEE Microwave And Guided Wave Letters, Vol.8, No. 8, August 1998, 269-271.
9. Muldavin J.B., Rebeiz G.M., High-Isolation CPW MEMS Shunt Switches - Part 1: Modeling, IEEE Transactions On Microwave Theory And Techniques, Vol. 48, No. 6, June 2000, pp. 1045-1052.
10. Muldavin J.B., Rebeiz G.M., High-Isolation CPW MEMS Shunt Switches - Part 2: Design, IEEE Transactions On Microwave Theory And Techniques, Vol. 48, No. 6, June 2000, pp. 1053-1056.
11. Lin C.C., Hsu H.M., Chen Y.H., Shih T., Jang S.M., Yu C.H., Liang M.S., A full Cu damascene metallization process for sub-0.18/spl mu/m RF CMOS SoC high Q inductor and MIM capacitor application at 2.4GHz and 5.3GHz, Interconnect Technology Conference, 2001. Proceedings of the IEEE 2001 International, 2001, pp. 113-115.