Optical properties and applications of heavily Fe implanted InP

Proceedings of the International Conference on Ion Implantation Technology

Volumn 22-27-September-2002, Issue , 2002, Pages 653-656

  Cesca, T ^a   Gasparotto, A ^a   Fraboni, B ^b   Priolo, F ^c   Moreira, E C ^c   Scamarcio, G ^d  

^a UNIVERSITY OF PADOVA   (Italy)

^b UNIVERSITY OF BOLOGNA   (Italy)

^c UNIVERSITY OF CATANIA   (Italy)

^d UNIVERSITY OF BARI   (Italy)

Author keywords

component; elctroluminescence; ion implantation; semi insulating InP

Indexed keywords

DOPING (ADDITIVES); ION IMPLANTATION; IONS;

COMPONENT; CURRENT VOLTAGE MEASUREMENT; ELCTROLUMINESCENCE; ELECTROLUMINESCENCE EMISSION; N-DOPED; N-DOPING; SEMI-INSULATING; SUBSTRATE DOPING;

OPTICAL PROPERTIES;

EID: 84961364443     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IIT.2002.1258090     Document Type: Conference Paper

References (8)

1. S. G. Bishop, "Iron Impurity Centers in III-V Semiconductors" in Deep Centers Semiconductors, S. T. Pantelides, Ed. Gordon and Breach Science Publishers, 1986, pp. 541-626.
2. P. B. Klein, J. E. Furneaux and R. L. Henry, "Laser oscillation at 3.53 μm from Fe2+ in n-InP:Fe," Appl. Phys. Lett. vol 42, pp. 638-640, April 1983.
3. G. Scamarcio, F. Capasso, A. L. Hutchinson, T. Tanbun-Ek, D. Sivco and A.Y. Cho, "Narrow-band electroluminescence at 3.5μm from impact excitation and ionization of Fe2+ ions in InP," Appl. Phys. Lett. vol 68, pp. 1374-1376, March 1996.
4. A. Gasparotto, A. Carnera, A. Paccagnella, B. Fraboni, F. Priolo, E. Gombia and R. Mosca, "High-resistance buried layers by MeV Fe implantation in n-type InP," Appl. Phys. Lett. vol 75, pp. 668-670, August 1999.
5. A. Gasparotto, A. Carnera, C. Frigeri, F. Priolo, B. Fraboni, A. Camporese and G. Rossetto, "Interation between Fe, dopants, and secondary defects in MeV Fe ion implanted InP," J. Appl. Phys. vol 85, pp. 753-760, January 1999.
6. M. A. Lampert and P. Mark, Current Injection in Solids, New York: Academic, 1970.
7. B. Fraboni, A. Gasparotto, F. Priolo and G. Scamarcio, "High Fe2+/3+ trap concentration in heavily compensated implanted InP," Appl. Phys. A, vol 73, pp. 35-38, May 2001.
8. A. Gasparotto, B. Fraboni, F. Priolo, F. Enrichi, A. Mazzone, G. Scamarcio, M. Troccoli and R. Mosca, "Assessment of electrical and optical properties of heavily Fe-implanted semi-insulating InP," Mater. Sci. Engin. B, vol 80, pp. 202-205, 2001.