Analysis of driving ability of bimorph-Qpe bending actuators synthesized by hydrothermal method

MHS 2001 - Proceedings of 2001 International Symposium on Micromechatronics and Human Science

Volumn , Issue , 2001, Pages 45-50

  Du, Liqun ^a   Arai, Fumihito ^a   Fukuda, Toshio ^a   Kwon, Guiryong ^a   Itoigawa, Kouichi ^b   Tukahara, Yasunori ^b  

^a NAGOYA UNIVERSITY   (Japan)

^b Tokai Rika Co Ltd   (Japan)

Author keywords

Bimorph type bending actuators; Driving ability; Hydrothermal method; Piezoelectric thin film

Indexed keywords

ACTUATORS; FILM THICKNESS; PIEZOELECTRIC ACTUATORS; SOCIAL SCIENCES; SUBSTRATES; TITANIUM;

BENDING ACTUATORS; DRIVING ABILITIES; HYDROTHERMAL METHODS; HYDROTHERMAL TREATMENTS; MEASURED VALUES; PIEZOELECTRIC THIN FILMS; THEORETICAL VALUES; TITANIUM SUBSTRATES;

THIN FILMS;

EID: 84958178150     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MHS.2001.965220     Document Type: Conference Paper

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