Ultralow-Loss CMOS Copper Plasmonic Waveguides

Nano Letters

Volumn 16, Issue 1, 2016, Pages 362-366

  Fedyanin, Dmitry Yu ^a   Yakubovsky, Dmitry I ^a   Kirtaev, Roman V ^a   Volkov, Valentyn S ^a,b  

^a MOSCOW INSTITUTE OF PHYSICS AND TECHNOLOGY   (Russian Federation)

^b UNIVERSITY OF SOUTHERN DENMARK   (Denmark)

Author keywords

CMOS plasmonics; Copper plasmonics; hybrid plasmonic waveguide; near field optical microscopy; plasmonic nanocircuitry

Indexed keywords

COPPER; DIFFRACTION; ELECTROMAGNETIC WAVE POLARIZATION; METALS; MICROELECTRONIC PROCESSING; MICROELECTRONICS; MOS DEVICES; OPTICAL WAVEGUIDES; OXIDE SEMICONDUCTORS; PHOTONICS; WAVEGUIDES;

COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; HYBRID PLASMONIC WAVEGUIDES; MICROELECTRONICS MANUFACTURING; NEAR FIELD OPTICAL MICROSCOPY; PLASMONIC NANOCIRCUITRY; PLASMONICS; SILICON MICROELECTRONICS; SURFACE PLASMON POLARITONS;

PLASMONS;

EID: 84957876439     PISSN: 15306984     EISSN: 15306992     Source Type: Journal    
DOI: 10.1021/acs.nanolett.5b03942     Document Type: Article

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