Experimental demonstration of titanium nitride plasmonic interconnects

Optics Express

Volumn 22, Issue 10, 2014, Pages 12238-12247

  Kinsey, N ^a   Ferrera, M ^a,b   Naik, G V ^a,c   Babicheva, V E ^d   Shalaev, V M ^a   Boltasseva, A ^a,d  

^a PURDUE UNIVERSITY   (United States)

^b HERIOT WATT UNIVERSITY   (United Kingdom)

^c STANFORD UNIVERSITY   (United States)

^d TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

INTEGRATED CIRCUIT INTERCONNECTS; METAL INSULATOR BOUNDARIES; PHOTONIC DEVICES; PLASMONS; SAPPHIRE; STRIP METAL; TITANIUM COMPOUNDS;

CMOS COMPATIBLE; EXPERIMENTAL DEMONSTRATIONS; METAL INSULATORS; PROPAGATION LOSS; SOLID-STATE STRUCTURES; SUPERSTRATES; TELECOMMUNICATION WAVELENGTHS; ULTRA-THIN METALS;

TITANIUM NITRIDE;

EID: 84901276554     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.22.012238     Document Type: Article

References (46)

1. R. Soref, "The past, present, and future of silicon photonics", IEEE J. Sel. Top. Quantum Electron. 12(6), 1678-1687 (2006).
2. S. Assefa, S. Shank, W. Green, M. Khater, E. Kiewra, C. Reinholm, S. Kamlapurkar, C. Schow, F. Horst, H. Pan, T. Topuria, P. Rice, D. M. Gill, J. Rosenberg, and T. Barwicz, "A 90nm CMOS integrated nano-photonics technology for 25Gbps WDM optical communications applications", in IEEE International Electron Devices Meeting (San Francisco, CA, 2012).
3. Intel Corporation, "Thunderbolt Technology", in Technology Brief (2012).
4. D. K. Gramotnev and S. I. Bozhevolnyi, "Plasmonics beyond the diffraction limit", Nat. Photonics 4(2), 83-91 (2010).
5. P. Berini, "Long-range surface plasmon polaritons", Adv. Opt. Photon. 1(3), 484 (2009).
6. A. Kumar, J. Gosciniak, V. S. Volkov, S. Papaioannou, D. Kalavrouziotis, K. Vyrsokinos, J. Weeber, K. Hassan, L. Markey, A. Dereux, T. Tekin, M. Waldow, D. Apostolopoulos, H. Avramopoulos, N. Pleros, and S. I. Bozhevolnyi, "Dielectric-loaded plasmonic waveguide components: Going practical", Laser Photon. Rev. 7(6), 1-14 (2013).
7. H. Cho, S. Member, P. Kapur, and K. C Saraswat, "Power Comparison between high-speed electrical and optical interconnects for interchip communication", IEEE J. Lightw. Technol. 22(9), 2021-2033 (2004).
8. H. M. G. Wassel, S. Member, D. Dai, M. Tiwari, J. K. Valamehr, L. Theogarajan, J. Dionne, F. T. Chong, and T. Sherwood, "Opportunities and Challenges of Using Plasmonic Components in Nanophotonic Architectures", IEEE J. Emerg. Sel. Topics Circuits Syst. 2(2), 154-168 (2012).
9. M. Kobrinsky, B. Block, J. Zheng, B. Barnett, E. Mohammed, M. Reshotko, F. Robertson, S. List, I. Young, and K. Cadien, "On-Chip Optical Interconnects", Intel Technol. J. 8(2), 129-142 (2004).
10. V. E. Babicheva, N. Kinsey, G. V. Naik, M. Ferrera, A. V. Lavrinenko, V. M. Shalaev, and A. Boltasseva, "Towards CMOS-compatible nanophotonics: ultra-compact modulators using alternative plasmonic materials", Opt. Express 21(22), 27326-27337 (2013).
11. R. Charbonneau, P. Berini, E. Berolo, and E. Lisicka-Shrzek, "Experimental observation of plasmon polariton waves supported by a thin metal film of finite width", Opt. Lett. 25(11), 844-846 (2000).
12. T. Nikolajsen, K. Leosson, I. Salakhutdinov, and S. I. Bozhevolnyi, "Polymer-based surface-plasmon-polariton stripe waveguides at telecommunication wavelengths", Appl. Phys. Lett. 82(5), 668 (2003).
13. A. Boltasseva, T. Nikolajsen, K. Leosson, K. Kjaer, M. S. Larsen, and S. I. Bozhevolnyi, "Integrated optical components utilizing long-range surface plasmon polaritons", IEEE J. Lightw. Technol. 23(1), 413-422 (2005).
14. P. Berini, R. Charbonneau, N. Lahoud, and G. Mattiussi, "Characterization of long-range surface-plasmonpolariton waveguides", J. Appl. Opt. 98(4), 043109 (2005).
15. J. Kim, S. Park, J. Ju, S. K. Park, M. Kim, and M. Lee, "Low-loss polymer-based long-range surface plasmonpolariton waveguide", IEEE Photon. Technol. Lett. 19(18), 1374-1376 (2007).
16. J. Jiang, C. L. Callender, S. Jacob, J. P. Noad, S. Chen, J. Ballato, and D. W. Smith, Jr., "Long-range surface plasmon polariton waveguides embedded in fluorinated polymer", Appl. Opt. 47(21), 3892-3900 (2008).
17. S. Park, J. J. Ju, J. T. Kim, M. S. Kim, S. K. Park, J. M. Lee, W. J. Lee, and M. H. Lee, "Sub-dB/cm propagation loss in silver stripe waveguides", Opt. Express 17(2), 697-702 (2009).
18. V. J. Sorger, N. D. Lanzillotti-Kimura, R. Ma, and X. Zhang, "Ultra-compact silicon nanophotonic modulator with broadband response", Nanophoton. 1(1), 17-22 (2012).
19. J. A. Dionne, K. Diest, L. A. Sweatlock, and H. A. Atwater, "PlasMOStor: a metal-oxide-Si field effect plasmonic modulator", Nano Lett. 9(2), 897-902 (2009).
20. Z. Lu, W. Zhao, and K. Shi, "Ultracompact electroabsorption modulators based on tunable epsilon-near-zero-slot waveguides", IEEE Photon. J. 4(3), 735-740 (2012).
21. A. Falk, F. Koppens, C. Yu, K. Kang, N. Snapp, A. Akimov, M. Jo, M. Lukin, and H. Park, "Near-field electrical detection of optical plasmons and single-plasmon sources", Nat. Phys. 5(7), 475-479 (2009).
22. O. Krupin, H. Asiri, C. Wang, R. N. Tait, and P. Berini, "Biosensing using straight long-range surface plasmon waveguides", Opt. Express 21(1), 698-709 (2013).
23. A. Kumar, J. Gosciniak, T. B. Andersen, L. Markey, A. Dereux, and S. I. Bozhevolnyi, "Power monitoring in dielectric-loaded surface plasmon-polariton waveguides", Opt. Express 19(4), 2972-2978 (2011).
24. P. Berini, "Figures of merit for surface plasmon waveguides", Opt. Express 14(26), 13030-13042 (2006).
25. G. V. Naik, J. L. Schroeder, X. Ni, A. V. Kildishev, T. D. Sands, and A. Boltasseva, "Titanium nitride as a plasmonic material for visible and near-infrared wavelengths", Opt. Mater. Express 2(4), 478-489 (2012).
26. G. V. Naik, V. M. Shalaev, and A. Boltasseva, "Alternative plasmonic materials: beyond gold and silver", Adv. Mater. 25(24), 3264-3294 (2013).
27. D. Steinmuller-Nethl, R. Kovacs, E. Gornik, and P. Rodhammer, "Excitation of surface plasmons on titanium nitride films: determination of the dielectric function", Thin Solid Films 237(1), 277-281 (1994).
28. M. B. Cortie, J. Giddings, and A. Dowd, "Optical properties and plasmon resonances of titanium nitride nanostructures", Nanotechnology 21(11), 115201 (2010).
29. A. Hibbins, J. Sambles, and C. Lawrence, "Surface plasmon-polariton study of the optical dielectric function of titanium nitride", J. Mod. Opt. 45(10), 2051-2062 (1998).
30. N. Chen, W. Lien, C. Liu, Y. Huang, Y. Lin, C. Chou, S. Chang, and C. Ho, "Excitation of surface plasma wave at TiN/air interface in the Kretschmann geometry", J. Appl. Opt. 109(4), 043104 (2011).
31. A. Emboras, R. M. Briggs, A. Najar, S. Nambiar, C. Delacour, P. Grosse, E. Augendre, J. M. Fedeli, B. De Salvo, H. A. Atwater, and R. Espiau De Lamaestre, "Efficient coupler between silicon photonic and metalinsulator-silicon-metal plasmonic waveguides", Appl. Phys. Lett. 101(25), 251117 (2012).
32. C. Delacour, S. Blaize, P. Grosse, J. M. Fedeli, A. Bruyant, R. Salas-Montiel, G. Lerondel, and A. Chelnokov, "Efficient directional coupling between silicon and copper plasmonic nanoslot waveguides: toward metal-oxidesilicon nanophotonics", Nano Lett. 10(8), 2922-2926 (2010).
33. K. MacDonald, Z. Sámson, M. Stockman, and N. Zheludev, "Ultrafast active plasmonics", Nat. Photonics 3(1), 55-58 (2009).
34. A. Emboras, A. Najar, S. Nambiar, P. Grosse, E. Augendre, C. Leroux, B. De Salvo, and R. E. De Lamaestre, "MNOS stack for reliable, low optical loss, Cu based CMOS plasmonic devices", Opt. Express 20(13), 13612-13621 (2012).
35. 2-Cu nanoplasmonic waveguides", Opt. Express 20(6), 5867-5881 (2012).
36. S. Zhu, G. Q. Lo, and D. L. Kwong, "Electro-absorption modulation in horizontal metal-insulator-siliconinsulator-metal nanoplasmonic slot waveguides", Appl. Phys. Lett. 99(15), 151114 (2011).
37. X. Shi, X. Zhang, Z. Han, U. Levy, and S. I. Bozhevolnyi, "CMOS-compatible long-range dielectric-loaded plasmonic waveguides", IEEE J. Lightw. Technol. 31(21), 3361-3367 (2013).
38. S. Kurtz and R. Hordon, "Chemical vapor deposition of titanium nitride at low temperatures", Thin Solid Films 140(2), 277-290 (1986).
39. S. Heil, E. Langereis, F. Roozeboom, M. Sanden, and W. Kessels, "Low-temperature deposition of TiN by plasma-assisted atomic layer deposition", J. Electrochem. Soc. 153(11), G956-G965 (2006).
40. R. Geffken and S. Luce, "Method of forming a self-aligned copper diffusion barrier in vias", US Patent 5, 985, 762 (1999).
41. S. I. Bozhevolnyi, Plasmonic Nanoguides and Circuits (Stanford Publishing, 2008).
42. S. A. Maier, Plasmonics: Fundamentals and Applications (2007).
43. G. I. Stegeman, R. F. Wallis, and A. A. Maradudin, "Excitation of surface polaritons by end-fire coupling", Opt. Lett. 8(7), 386-388 (1983).
44. C. D. Sheraw, D. J. Gundlach, and R. N. Jackson, "Spin-on polymer gate dielectric for high performance organic thin film transistors", MRS Proceedings 583 (1999).
45. V. S. Volkov, Z. Han, M. G. Nielsen, K. Leosson, H. Keshmiri, J. Gosciniak, O. Albrektsen, and S. I. Bozhevolnyi, "Long-range dielectric-loaded surface plasmon polariton waveguides operating at telecommunication wavelengths", Opt. Lett. 36(21), 4278-4280 (2011).
46. R. F. Oulton, V. J. Sorger, D. A. Genov, D. F. P. Pile, and X. Zhang, "A hybrid plasmonic waveguide for subwavelength confinement and long-range propagation", Nature Photon. 2, 496-500 (2008).