A novel MEMS strain sensor for structural health monitoring applications under harsh environmental conditions

Structural Health Monitoring 2007: Quantification, Validation, and Implementation - Proceedings of the 6th International Workshop on Structural Health Monitoring, IWSHM 2007

Volumn 1, Issue , 2007, Pages 121-128

  Mohammed, A A S ^a   Moussa, W A ^a   Lou, E ^b  

^a UNIVERSITY OF ALBERTA   (Canada)

^b GLENROSE REHABILITATION HOSPITAL   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; WIRELESS SENSOR NETWORKS;

DISTRIBUTED WIRELESS SENSOR NETWORKS; ENVIRONMENTAL CONDITIONS; LOW-POWER CONSUMPTION; MECHANICAL PARAMETERS; MICRO ELECTROMECHANICAL SYSTEM (MEMS); OPERATING CONDITION; STRUCTURAL HEALTH MONITORING (SHM); WIDE TEMPERATURE RANGES;

STRUCTURAL HEALTH MONITORING;

EID: 84945174597     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. Spencer, B. F. 2003. "Opportunities and Challenges for Smart Sensing Technology, " Proc. of the First International Conference on Structural Health Monitoring and Intelligent Infrastructure, Tokyo, Japan: 65-71.
2. Nagy, M. L., C. Apanius, and J. W. Siekkinen. June 2001. "A User Friendly, High-Sensitivity Strain Gauge, " J. Sensors, Vol. 18: 20-27.
3. Hrovat, M., D. Belavic, Z. Samardzija, and J. Hole. May 2001. "An investigation of thick-film resistor, fired at different temperatures, for strain sensors, " International Spring Seminar on Electronics Technology: 32-36.
4. Wojciechowski, K. E., B. E. Boser, and A. P. Pisano. 2004. "A MEMS resonant strain sensor operated in air, " The Seventeenth Annual International Conference on Micro Electro Mechanical Systems (IEEE-MEMS)Ml-S45.
5. Mohammed A.A.S., Walied A.M. 2005 Design and simulation of electrostatically driven microresonator using piezoresistive elements for strain measurements Proc. of2005 International Conference on MEMS, NANO and Smart Systems, 2005, Banff, AB, Canada July 24-27 2005 (IEEE Trans.): 103-105.
6. Guo, J., H. I. Kuo, D. J. Young, and W. H. Ko. June 2004. "Buckled beam linear output capacitive strain sensor", Solid State Sensor, Actuator and Microsystems Workshop at Hilton Head: 399-403.
7. L. Que, M.-H. Li, L. L. Chu, and Y. B. Gianchandani. October 2002. "Measurements of material properties using differential capacitive strain sensors, " Journal of Microelectromechanical Systems, Vol. 11: 489-498.
8. Kanda , Y. 1982. "A graphical representation of the piezoresistance coefficients in silicon, " IEEE Trans. Electron Dev., Vol. 29: 64-70.
9. Smith, C.S. 1954. "Piezoresistance effect in silicon and germanium, : Phys. Rev., 94(1): 42-49
10. Harley, J.A., and T.W. Kenny. 2000. "1/f noise considerations for the design and process optimization of piezoresistive cantilevers, " J. Microelectromech. Syst. Vol. 9: 226-235.