Design and simulation of one-port resonant- piezoresistive strain sensor

Proceedings - 2005 International Conference on MEMS, NANO and Smart Systems, ICMENS 2005

Volumn , Issue , 2005, Pages 103-105

  Mohammed, Ahmed A S ^a   Moussa, Walied A ^a  

^a UNIVERSITY OF ALBERTA   (Canada)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC RESISTANCE; MICROMACHINING; PIEZOELECTRIC DEVICES; STRAIN MEASUREMENT;

MICROFABRICATION PROCESS; PIEZORESISTIVE STRAIN SENSORS; PORT MICROBRIDGE; RESONATOR CIRCUITS;

SENSORS;

EID: 33749073597     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICMENS.2005.39     Document Type: Conference Paper

References (7)

1. N. Roy and R. Ganguli, "Helicopter rotor blade frequency evolution with damage growth and signal processing", Journal of Sound and Vibration, vol. 283, Issues 3-5, 20 May 2005, pp. 821-851.
2. W. Lestari and P. Qiao, "Damage detection of fiber-reinforced polymer honeycomb sandwich beams", Composite Structures, vol. 67, Issue 3, March 2005, pp. 365-373.
3. I. Herszberg, H.C.H. Li, F. Dharmawan, A.P. Mouritz, M. Nguyen and J. Bayandor, "Damage assessment and monitoring of composite ship joints", Composite Structures, vol. 67, Issue 2, February 2005, pp. 205-216.
4. A. Pedrocchi, S. Hoen, G. Ferrigno, and A. Pedotti, "Perspectives on MEMS in bioengineering: a novel capacitive position microsensor [and laser surgery and drug delivery applications]; Biomedical Engineering", IEEE Trans., vol. 47, Issue 1, Jan. 2000 pp. 8-11.
5. S. Pourkamali, A. Hashimura, R. Abdolvand, G.K. Ho, A. Erbil, and F. Ayazi, "High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100-nm transduction gaps", J. Microelectromechanical Systems, vol. 12, Issue 4, Aug. 2003, pp. 487-496.
6. S. Bouwstra and B. Geijselaers, "On the resonance frequencies of microbridges", Solid-State Sensors and Actuators, 1991. Digest of Technical Papers, TRANSDUCERS '91., 1991 International Conference on 24-27 June 1991, pp. 538-542.
7. K.A. Shaw, Z. L. Zhang and N. C. MacDonald, "SCREAM I: A single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures", Sensors and Actuators A: Physical, vol. 40, Issue 1, January 1994, pp. 63-70.