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Volumn 2, Issue , 2003, Pages 1112-1115
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Thin film nano thermocouple sensors for applications in laser and electron beam irradiation
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Author keywords
Electron beams; Laser applications; Sensor phenomena and characterization; Spatial resolution; Temperature sensors; Thermal sensors; Thin film circuits; Thin film sensors; Transistors; Very large scale integration
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Indexed keywords
ACTUATORS;
ELECTRON BEAMS;
IRRADIATION;
LASER APPLICATIONS;
MICROSYSTEMS;
TEMPERATURE SENSORS;
THERMOCOUPLES;
THIN FILM CIRCUITS;
THIN FILMS;
TRANSDUCERS;
TRANSISTORS;
VLSI CIRCUITS;
LASER AND ELECTRON BEAMS;
SOLID-STATE STRUCTURES;
SPATIAL AND TEMPORAL RESOLUTIONS;
SPATIAL RESOLUTION;
TEMPERATURE SENSITIVITY;
THERMAL SENSORS;
THIN FILM SENSORS;
THIN FILM THERMOCOUPLE;
SOLID-STATE SENSORS;
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EID: 84944739576
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/SENSOR.2003.1216964 Document Type: Conference Paper |
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Times cited : (22)
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References (11)
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