A simple SOI-CMOS compatible technology to make flexible electronics

Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Volumn , Issue , 2012, Pages 429-432

  Tu, Hongen ^a   Xu, Yong ^a  

^a WAYNE STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CMOS INTEGRATED CIRCUITS; COATINGS; FLEXIBLE ELECTRONICS; FLUORINE COMPOUNDS; MEDICAL APPLICATIONS; MICROSYSTEMS; ORGANIC SEMICONDUCTOR MATERIALS; SOLID-STATE SENSORS;

CMOS TECHNOLOGY; DIRECT COATINGS; FABRICATION TECHNIQUE; FLEXIBLE SENSOR; FLEXIBLE SUBSTRATE; HIGH TEMPERATURE PROCESS; INORGANIC SEMICONDUCTORS; TRANSFER PRINTING;

SUBSTRATES;

EID: 84944707653     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31438/trf.hh2012.114     Document Type: Conference Paper

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