Modeling and design aspects of the MEMS switch

Proceedings of the International Semiconductor Conference, CAS

Volumn 1, Issue , 2003, Pages 125-128

  Simion, S ^a  

^a MILITARY TECHNICAL ACADEMY   (Romania)

Author keywords

Bridge circuits; Coplanar waveguides; Dielectrics; Electrostatics; Geometry; Micromechanical devices; Microswitches; Springs; Switches; Voltage

Indexed keywords

BRIDGE CIRCUITS; COPLANAR WAVEGUIDES; DIELECTRIC MATERIALS; ELECTRIC POTENTIAL; ELECTROSTATICS; GEOMETRY; SPRINGS (COMPONENTS); SWITCHES;

APPLIED VOLTAGES; ELECTRICAL ANALYSIS; ELECTRICAL MODELING; GENERAL FORMULAS; MECHANICAL ANALYSIS; MICROMECHANICAL DEVICE; MICROSWITCHES; REAL DISTRIBUTION;

ELECTRIC SWITCHES;

EID: 84944313467     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SMICND.2003.1251360     Document Type: Conference Paper

References (6)

1. J. Rizk, G.-L. Tan, J.B. Muldavin, G.M. Rebeiz, "High-isolation W-band MEMS switches", IEEE Microwave and Guided Wave Letters, 11 (1), January, pp. 10-12, 2001.
2. J. B. Muldavin, G.M. Rebeiz, "Inline capacitive and DC-contact MEMS shunt switches", IEEE Microwave and Guided Wave Letters, 11 (8), August, pp. 334-336, 2001.
3. J.S. Hayden, G. M. Rebeiz, "Low-loss cascadable MEMS distributed X-band phase shifters", IEEE Microwave and Guided Wave Letters, 10 (4), April, pp. 142-144, 2000.
4. N.S. Barker, G.M. Rebeiz, "Distributed MEMS transmission-ine BPSK modulator", IEEE Microwave and Guided Wave Letters, 10 (5), May, pp.198-200, 2000.
5. J.B. Muldavin, G.M. Rebeiz, "High-isolation CPW MEMS shunt switches-part 1: modeling", IEEE Trans. on Microwave Theory and Techniques, 48 (6), June, pp. 1045-1052, 2000.
6. J.B. Muldavin, G.M. Rebeiz, "Nonlinear electromechanical modeling of MEMS switches", Proc. of the IEEE Digest, 2001.