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Volumn 3519, Issue , 1998, Pages 148-156

Alignment of microparts using force controlled pushing

Author keywords

Adhesion; AFM cantilever; Alignment operation; Force control; Force sensing; Micromanipulation; Micropart; Micropositioning; Microtaction; Pushing

Indexed keywords

ALIGNMENT; ATOMIC FORCE MICROSCOPY; FORCE CONTROL; FORCE MEASUREMENT; SENSORS;

EID: 0037959958     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.325735     Document Type: Conference Paper
Times cited : (50)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.