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Volumn 5, Issue 88, 2015, Pages 72051-72057

Laser desorption ionization (LDI) silicon nanopost array chips fabricated using deep UV projection lithography and deep reactive ion etching

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL ANALYSIS; DESORPTION; IONIZATION; IONIZATION OF GASES; MASS SPECTROMETRY; PHOTOLITHOGRAPHY; QUALITY CONTROL; SILICON; SPECTROMETRY;

EID: 84940548956     PISSN: None     EISSN: 20462069     Source Type: Journal    
DOI: 10.1039/c5ra11875a     Document Type: Article
Times cited : (30)

References (41)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.