Development of a miniature time-of-flight mass/charge spectrometer for ion beam source analyzing

International Journal of Mass Spectrometry

Volumn 379, Issue , 2015, Pages 60-64

  Huang, Zhengxu ^a,b   Tan, Guobin ^b   Zhou, Zhen ^a,b   Chen, Lei ^c   Cheng, Liang ^c   Jin, Dazhi ^c   Tan, Xiaohua ^c   Xie, Chunguang ^d   Li, Lei ^a   Dong, Junguo ^b   Fu, Zhong ^b,d   Cheng, Ping ^b   Gao, Wei ^a  

^a JINAN UNIVERSITY   (China)

^b SHANGHAI UNIVERSITY   (China)

^c RESEARCH CENTER OF LASER FUSION   (China)

^d Guangzhou Hexin Analytical Instrument Company Limited   (China)

Author keywords

Cathodic vacuum arc discharge ion source; Diagnostic of discharge plasma; Miniature time of flight mass spectrometer

Indexed keywords

EID: 84939943335     PISSN: 13873806     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.ijms.2014.12.003     Document Type: Article

References (35)

1. G.Y. Yushkov, A. Anders, E.M. Oks, and I.G. Brown Ion velocities in vacuum arc plasmas J. Appl. Phys. 88 2000 5618 5622
2. A.G. Nikolaev, K.P. Savkin, G.Y. Yushkov, and E.M. Oks Ion angular distribution in plasma of vacuum arc ion source with composite cathode and elevated gas pressure Rev. Sci. Instrum. 85 2014 02B501
3. R.L. Boxman, D.M. Sanders, and P.J. Martin Handbook of Vacuum Arc Science and Technology 1995 Noyes Park Ridge, NJ
4. I.G. Brown Vacuum arc ion sources Rev. Sci. Instrum. 65 1994 3061
5. A.G. Nikolaev, E.M. Oks, K.P. Savkin, G.Y. Yushkov, and I.G. Brown Upgraded vacuum arc ion source for metal ion implantation Rev. Sci. Instrum. 83 2012 02A501
6. R. Tanberg On the cathode of an arc drawn in vacuum Phys. Rev. 35 1930 1080 1089
7. W.D. Davis, and H.C. Miller Analysis of the electrode products emitted by dc arcs in a vacuum ambient J. Appl. Phys. 40 1969 2212 2221
8. A.A. Plyutto, V.N. Ryzhkov, and A.T. Kapin High speed plasma streams in vacuum Sov. Phys.: JETP 20 1965 328 337
9. A.S. Bugaev, V.I. Gushenets, A.G. Nikolaev, E.M. Oks, and G.Y. Yushkov Influence of a current jump on vacuum arc parameters IEEE Trans. Plasma Sci. 27 1999 882 887
10. A.S. Bugaev, E.M. Oks, G.Y. Yushkov, A. Anders, and I.G. Brown Enhanced ion charge states in vacuum arc plasmas using a current spike method Rev. Sci. Instrum. 71 2000 701
11. A. Anders, and G.Y. Yushkov Ion flux from vacuum arc cathode spots in the absence and presence of a magnetic field J. Appl. Phys. 91 2002 4824 4832
12. A.A. Sysoev The Physics and Engineering of Mass Spectrometry Devices and Electromagnetic Setups 1983 Energoatomizdat Moscow
13. V.I. Gushenets, A.G. Nikolaev, E.M. Oks, L.G. Vintizenko, G.Y. Yushkov, A. Oztarhan, and I.G. Brown Simple and inexpensive time-of-flight charge-to-mass analyzer for ion beam source characterization Rev. Sci. Instrum. 77 2006 063301
14. G.Y. Yushkov 19th International Symposium on Discharges and Electrical Insulation in Vacuum Xi'an 2000 260
15. E. Cheifetz, U. Adar, and G. Davara 17th International Symposium on Discharges and Electrical Insulation in Vacuum Berkeley 1996 194
16. A. Anders, and G.Y. Yushkov The kinetic energy of carbon ions in vacuum arc plasmas: a comparison of measuring techniques J. Appl. Phys. 96 2004 970
17. L. Chen, D. Jin, L. Cheng, L. Shi, X. Tan, W. Xiang, J. Dai, and S. Hu Ion charge state distribution and ion velocities in the titanium hydride cathodic vacuum arc plasmas Vacuum 86 2012 813 934
18. C. Guo, Z. Huang, W. Gao, H. Nian, H. Chen, J. Dong, G. Shen, J. Fu, and Z. Zhou A homemade high-resolution orthogonal-injection time-of-flight mass spectrometer with a heated capillary inlet Rev. Sci. Instrum. 79 2008 013109
19. L. Li, Z. Huang, J. Dong, M. Li, W. Gao, H. Nian, Z. Fu, G. Zhang, X. Bi, P. Cheng, and Z. Zhou Real time bipolar time-of-flight mass spectrometer for analyzing single aerosol particles Int. J. Mass Spectrom. 303 2011 118 124
20. Y. Wang, H. Xu, Q. Li, N. Li, Z. Huang, Z. Zhou, H. Liu, Z. Sun, X. Xu, H. Yu, H. Liu, D.D.-U. Li, X. Wang, X. Dong, and W. Gao Rapid Commun. Mass Spectrom. 27 2013 1155 1167
21. W. Gao, G. Tan, Y. Hong, M. Li, H. Nian, C. Guo, Z. Huang, Z. Fu, J. Dong, X. Xu, P. Cheng, and Z. Zhou Development of portable single photon ionization time-of-flight mass spectrometer combined with membrane inlet Int. J. Mass Spectrom. 334 2013 8 12
22. W. Gao, Z. Huang, H. Nian, X. Shen, P. Wang, S. Hu, M. Li, P. Cheng, J. Dong, X. Xu, and Z. Zhou A novel gas analysis system for metallurgical materials based on time-of-flight mass spectrometry Int. J. Mass Spectrom. 294 2010 77 82
23. A.F. Dodonov, A.V. Loboda, V.I. Kozlovski, I.V. Soulimenkov, V.V. Razinkov, Z. Zhou, and H. Wollnik High-resolution electrospray ionization orthogonal-injection time-of-flight mass spectrometer Eur. J. Mass Spectrom. 6 2000 481 490
24. Y.H. Chen, M. Gonin, K. Fuhrer, A. Dodonov, C.S. Su, and H. Wollnik Int. J. Mass Spectrom. 221 1999 185 187
25. J.G. Timothy Curved channel microchannel array plates Rev. Sci. Instrum. 52 1981 1131 1142
26. G.W. Fraser The ion detection efficiency of microchannel plates (MCPs) Int. J. Mass Spectrom. 215 2002 13 30
27. + ions Rev. Sci. Instrum. 57 1986 349 353
28. M. Hellsing, L. Karlsson, H.-O. Andren, and H. Norden Performance of a microchannel plate ion detector in the energy range 3-25 keV J. Phys. E: Sci. Instrum. 18 1985 920 925
29. q+ (3 q 16) Rev. Sci. Instrum. 68 1997 3053 3060
30. http://www.leco.com/component/edocman/?task=document.viewdoc&id=50&Itemid=0
31. http://www.absciex.com.cn/Documents/Downloads/Literature/5600-plus-BR-FIN2-single.pdf
32. A. Anders A periodic table of ion charge-state distributions observed in the transition region between vacuum sparks and vacuum arcs IEEE Trans. Plasma Sci. 29 2001 393 398
33. E. Byon, and A. Anders Ion energy distribution functions of vacuum arc plasmas J. Appl. Phys. 93 2003 1899 1906
34. I.G. Brown, J.E. Galvin, R.A. MacGill, and R.T. Wright Improved time-of-flight charge state diagnostic Rev. Sci. Instrum. 58 9 1987 1589
35. A. Oztarhana, I. Brownb, C. Bakkalogluc, G. Wattd, P. Evansd, E. Okse, A. Nikolaeve, and Z. Tek Metal vapour vacuum arc ion implantation facility in Turkey Surf. Coat. Technol. 196 2005 327 332