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Volumn 85, Issue 2, 2014, Pages
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Ion angular distribution in plasma of vacuum arc ion source with composite cathode and elevated gas pressure
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Author keywords
[No Author keywords available]
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Indexed keywords
CATHODES;
CHARGED PARTICLES;
ELECTRODES;
GASES;
ION BEAMS;
ION SOURCES;
METAL IONS;
METAL WORKING;
METALS;
VACUUM APPLICATIONS;
VACUUM TECHNOLOGY;
CATH-ODE MATERIALS;
DISTRIBUTION OF METAL IONS;
ION ANGULAR DISTRIBUTION;
METAL VAPOR VACUUM ARCS;
MULTIPLY CHARGED IONS;
SINGLY CHARGED IONS;
VACUUM ARC ION SOURCE;
WORKING GAS PRESSURE;
ANGULAR DISTRIBUTION;
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EID: 84926683556
PISSN: 00346748
EISSN: 10897623
Source Type: Journal
DOI: 10.1063/1.4824641 Document Type: Conference Paper |
Times cited : (25)
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References (12)
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