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Volumn 85, Issue 2, 2014, Pages

Ion angular distribution in plasma of vacuum arc ion source with composite cathode and elevated gas pressure

Author keywords

[No Author keywords available]

Indexed keywords

CATHODES; CHARGED PARTICLES; ELECTRODES; GASES; ION BEAMS; ION SOURCES; METAL IONS; METAL WORKING; METALS; VACUUM APPLICATIONS; VACUUM TECHNOLOGY;

EID: 84926683556     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.4824641     Document Type: Conference Paper
Times cited : (25)

References (12)
  • 12
    • 0001720167 scopus 로고    scopus 로고
    • A. Anders, Phys. Rev. E 55, 969 (1997). 10.1103/PhysRevE.55.969
    • (1997) Phys. Rev. e , vol.55 , pp. 969
    • Anders, A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.