Micro-electroforming of miniaturized devices for chemical applications

Electrochemical Microsystem Technologies

Volumn , Issue , 2002, Pages 245-268

  Löwe, Holger ^a   Ehrfeld, Wolfgang ^b   Schiewe, Jörg ^b  

^a INSTITUT FÜR MIKROTECHNIK MAINZ GMBH   (Germany)

^b RUHR UNIVERSITY BOCHUM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84939781344     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.4324/9780203219218     Document Type: Chapter

References (50)

1. Ehrfeld, W. “Die Chemieanlage aus der Retorte / Chemical plants from test tubes”, ACHEMA Magazin 94 (1994) 8-11.
2. Ehrfeld, W., Golbig, K., Hessel, V., Löwe, H. and Richter, T. “Microfluidic reaction systems: LIGA-a favourable process for microreactors”, mst news 17(5) (1996) 5.
3. Ehrfeld, W., Löwe, H., Hessel, V. and Richter, T. “Anwendungspotentiale für chemische und biologische Mikroreaktoren”, Chemie IngenieurTechnik 69(7) (1997) 931-934.
4. Löwe, H. and Ehrfeld, W. “State of the art in microreaction technology: concepts, manufacturing and applications”, Electrochim. Acta 44 (1999) 3679-3689.
5. Beck, F. and Guthke, H. “Entwicklung neuer Zellen für elektro-organische Synthesen”, Chemie Ing. Techn. 41(17) (1969) 943-990.
6. Hessel, V., Ehrfeld, W., Golbig, K., Haverkamp, V., Löwe, H., Storz, M., Wille, C., Guber, A., Jähnisch, K. and Baerns, M. “Gas/liquid microreactors for direct fluorination of aromatic compounds using elemental fluorine”, in Ehrfeld, W. (ed.) Microreaction Technology: 3rd International Conference on Microreaction Technology, Proceedings of IMRET 3, pp. 526-540, Springer-Verlag, Berlin (2000).
7. Bayer, T., Pysall, D. and Wachsen, O. “Micro mixing effects in continuous radical polymerization”, in Ehrfeld, W. (ed.) Microreaction Technology: 3rd International Conference on Microreaction Technology, Proceedings of IMRET 3, pp. 165-170, Springer-Verlag, Berlin (2000).
8. Krummradt, H., Kopp, U. and Stoldt, J. “Experiences with the use of microreactors in organic synthesis”, in Ehrfeld, W. (ed.) Microreaction Technology: 3rd International Conference on Microreaction Technology, Proceedings of IMRET 3, pp. 181-186, Springer-Verlag, Berlin (2000).
9. Kestenbaum, H., Lange de Olivera, A., Schmidt, W., Schüth, H., Ehrfeld, W., Gebauer, K., Löwe, H. and Richter, T. “Synthesis of ethylene oxide in a catalytic microreactor system”, in Proceedings of the 12th Int. Conf. on Catalysis 2000, Granada, Spain (2000).
10. Kestenbaum, H., Lange de Oliveira, A., Schmidt, W., Schüth, F., Gebauer, K., Löwe, H. and Richter, T. “Synthesis of ethylene oxide in a catalytic microreacton system”, in Ehrfeld, W. (ed.) Microreaction Technology: 3rd International Conference on Microreaction Technology, Proceedings of IMRET 3, pp. 207-212, Springer-Verlag, Berlin (2000).
11. Richter, T., Ehrfeld, W., Gebauer, K., Golbig, K., Hessel, V., Löwe, H. and Wolf, A. “Metallic microreactors: components and integrated systems”, in Ehrfeld, W., Rinard, I. H., Wegeng, R. S. (eds) Process Miniaturization: 2nd International Conference on Microreaction Technology, IMRET 2; Topical Conference Preprints, pp. 146-151, AIChE, New Orleans, USA (1998).
12. Schubert, K., Bier, W., Brandner, J., Fichtner, M., Franz, C. and Linder, G. “Realization and testing of microstructure reactors, micro heat exchangers and micromixers for industrial applications in chemical engineering”, in Ehrfeld, W., Rinard, I. H., Wegeng, R. S. (eds) Process Miniaturization: 2nd International Conference on Microreaction Technology, IMRET 2; Topical Conference Preprints, pp. 88-95, AIChE, New Orleans, USA (1998).
13. Hagendorf, U., Janicke, M., Schüth, F., Schubert, K. and Fichtner, M. “A Pt/Al2O3 coated microstructured reactor/heat exchanger for the controlled H2/O2-reaction in the explosion regime”, in Ehrfeld, W., Rinard, I. H., Wegeng, R. S. (eds) Process Miniaturization: 2nd International Conference on Microreaction Technology; Topical Conference Preprints, pp. 81-87, AIChE, New Orleans, USA (1998).
14. Jandeleit, B., Schaefer, D. J., Powers, T. S., Turner, H. W. and Weinberg, W. H. “Kombinatorische Materialforschung und Katalyse”, Angew. Chem. 111(17) (1999) 2649.
15. Asmead, J. W., Blaisdell, C. T., Johnson, M. H., Nyquist, J. K., Perotto, J. A. and Ryley, J. F. “Integrated chemical processing apparatus and processes for the preparation thereof ", EP 0 688 242 B1, (19.03.1993); E.I. Du Pont de Nemours and Company; Wilmington (USA).
16. Ehrfeld, W. and Lehr, H. “Deep X-ray lithography for the production of three dimensional microstructures from metals, polymers and ceramics”, Radiat. Phys. Chem. 45(3) (1995) 349-365.
17. Bauer, H.-D., Weber, L. and Ehrfeld, W. “Formeinsätze für die Massenfertigung von hochpräzisen Kunststoffteilen: Die LIGA-Technik”, Werkzeug und Formenbau 4 (1994) 22-26.
18. Löwe, H., Ehrfeld, W., Gebauer, K., Golbig, K., Hausner, O., Haverkamp, V., Hessel, V. and Richter, T. “Microreactor concepts for heterogeneous gas phase reactions”, in Ehrfeld, W., Rinard, I. H., Wegeng, R. S. (eds) Process Miniaturization: 2nd International Conference on Microreaction Technology, IMRET 2; Topical Conference Preprints Process Miniaturization: 2nd International Conference on Microreaction Technology; Topical Conference Preprints, pp. 63-74, AIChE, New Orleans, USA (1998).
19. Ehrfeld, W., Lehr, H., Michel, F. and Wolf, A. “Micro electro discharge machining as a technology in micromachining”, in Proceedings of the “SPIE Symposium on Micromachining and Microfabrication”, 14-15 Oct., 1996; pp. 332-337; Austin TX, USA.
20. Ehrfeld, W. and Becker, E.-W. “Das LIGA-Verfahren zur Herstellung von Mikrostrukturkörpern mit großen Aspektverhältnis und großer Strukturhöhe”, KfK -Nachrichten 19(4) (1987) 167.
21. Ehrfeld, W., Bley, P., Götz, F., Hagmann, P., Maner, A., Mohr, J., Moser, H. O., Münchmeyer, D., Schelb, W., Schmidt, D. and Becker, E. W. “Fabrication of microstructures using the LIGA process”, in Proceedings of the “IEEE Micro Robots and Teleoperator Workshop”, 9-11 Nov., 1987; p. 1; Hyannis, Cape Cod MA, USA.
22. Ehrfeld, W. and Münchmeyer, D. “LIGA method - Three-dimensional microfabrication using synchrotron radiation”, Nuclear Instruments and Methods in Physics Research A 303 (1991) 523-531.
23. Ehrfeld, W. and Lehr, H. “Synchrotron radiation and LIGA-technique”, Synchrotron Radiat. News 7(5) (1994) 9-13.
24. Bischofberger, R., Zimmermann, H. and Staufert, G. “Low-cost HARMST-Process”, Sensors and Actuators A 61 (1997) 392-399.
25. Puippe, J.-C. “UV-LIGA-Mikrogalvanoformung”, Metalloberfläche 52(11) (1998) 871.
26. Arnold, J., Dasbach, U., Ehrfeld, W., Hesch, K. and Löwe, H. “Combination of excimer laser micromachining and replication processes suited for large scale production (Laser-LIGA)", Appl. Surf. Sci. 86 (1995) 251.
27. Sander, D., Hoffmann, R. and Relling, V. M., J. “Fabrication of metallic microstructures by electroplating using deep-etched silicon moulds”, J. Microelectromechanical Systems 4(2) (1995) 81.
28. Löwe, H., Ehrfeld, W. and Diebel, J. “Ultraprecision microelectroforming of metals and metal alloys”, in Proceedings of the “Micromachining and Microfabrication Process Technology 3", 29-30 Sept., 1997; pp. 168-175; Austin TX, USA.
29. Bratoeva, M. and Atanassov, N. “Nickel-tungsten alloy electrodeposition from sulfamate electrolyte”, Metal Finishing 96(6) (1998) 92.
30. Stark, W., Saumer, M. and Matthis, B. “Nickelsulfamat-Elektrolyte für die Mikrogalvanoformung”, Galvanotechnik 86(12) (1995) 3931.
31. Leyendecker, K., Bacher, W. and Bade, K. “Untersuchungen zum Stofftransport bei der Galvanoformung von LIGA-Mikrostrukturen”, Galvanotechnik 89(2) (1998) 382-391.
32. Löwe, H., Mensinger, H. and Ehrfeld, W. “Galvanoformung in der LIGA-Technik”, in Zielonka, A. (ed.) Jahrbuch Oberflächentechnik, Vol. 50, pp. 77-95, Metall Verlag, Heidelberg (1994).
33. Chiu, S.-L. and Acosta, R. E. “Electrodeposition of low stress gold for X-ray masks”, J. Vac. Sci. Technol. B 8(6) (1990) 1589.
34. Bacher, W., Bley, P., Hein, H., Klein, U., Mohr, J., Schomburg, W. K., Schwarz, R. and Stark, W. “Herstellung von Röntgenmasken für das LIGA - Verfahren”, KfK -Nachrichten 23(2-3) (1991) 76.
35. Gemmler, A., Keller, W. and Ruess, K. “Mikrostrukturen”, Metalloberfläche 47(9) (1993) 461.
36. Küpper, M., Baltrunas, G. and Löwe, H. “Elektrolytische Abscheidung von Gold in der Mikrotechnik”, Galvanotechnik 88(9) (1997) 2906.
37. Ehrfeld, W., Hessel, V., Löwe, H., Schulz, C. and Weber, L. “Materials of LIGA technology”, Microsystem Technologies (1997) 112.
38. Abel, S., Ehrfeld, W., Lehr, H., Möbius, H. and Schmitz, F. “Charakterisierung von Materialien zur Fertigung elektromagnetischer Mikroaktuatoren in LIGA-Technik”, in Proceedings of the “International Conference on Micro Materials”, 1996; p. 413; Dresden, Germany.
39. Aroyo, M. and Zonev, N. "Über das Mikrostreuvermögen bei der elektrochemischen Abscheidung von glänzenden Kupferschichten aus sauren Sulfatlösungen mit Pulsstrom”, Galvanotechnik 83(3) (1992) 855.
40. Leisner, P., Tang, P. and Bech-Nielsen, G. “The optimization of throwing power in pulse reversal plating from silver cyanide solution”, in Proceedings of the "81st AESF Annual Technical Conference, SUR/FIN '94", 1994; pp. 79-84; Indianapolis, USA.
41. Linder, G., Bier, W., Schaller, T., Schubert, K. and Seidel, D. “Mikrowärmeübertrager und Mikroreaktoren”, in Proceedings of the “ACHEMA 94, Internationales Treffen für chemische Technik und Biotechnologie; Tagungsband des Symposiums ‘Mikrotechnik’", 6.-10. Mai, 1994; Frankfurt/M., Germany.
42. Wolf, A., Ehrfeld, W., Lehr, H., Michel, F., Richter, T., Gruber, H. and Wörz, O. “Mikroreaktorfertigung mittels Funkenerosion”, F & M, Feinwerktechnik, Mikrotechnik, Meßtechnik 6 (1997) 436-439.
43. Wolf, A., Ehrfeld, W., Michel, F., Koch, O., Preuß, S., Soultan, H. and Gruber, H. P. “Application of new actuator and vision control systems for micro electro discharge machining”, in Proceedings of the “Intelligent Systems and Advanced Manufacturing”, 1-6 Nov., 1998; Boston, USA.
44. Villermaux, J., Falk, L., Fournier, M.-C. and Detrez, C. “Use of parallel competing reactions to characterize micromixing efficiency”, AIChE Sym. Ser. 88(286) (1991) 6.
45. Ehrfeld, W., Golbig, K., Hessel, V., Löwe, H. and Richter, T. “Characterization of mixing in micromixers by a test reaction: single mixing units and mixer arrays”, Ind. Eng. Chem. Res. 38(3) (1999) 1075-1082.
46. Haverkamp, V., Ehrfeld, W., Gebauer, K., Hessel, V., Löwe, H., Richter, T. and Wille, C. “The potential of micromixers for contacting of disperse liquid phases”, Fresenius J. Anal. Chem. 364 (1999) 617-624.
47. Hessel, V., Ehrfeld, W., Golbig, K., Haverkamp, V., Löwe, H. and Richter, T. “Gas/liquid dispersion processes in micromixers: the hexagon flow”, in Ehrfeld, W., Rinard, I. H., Wegeng, R. S. (eds) Process Miniaturization: 2nd International Conference on Microreaction Technology, IMRET 2; Topical Conference Preprints, pp. 259-266, AIChE, New Orleans, USA (1998).
48. Hessel, V., Ehrfeld, W., Haverkamp, V., Löwe, H. and Schiewe, J. “Generation of dispersions using multilamination of fluid layers in micromixers”, in Müller, R. H., Böhm, B. (eds) Dispersion Techniques for Laboratory and Industrial Production, Wissenschaftliche Verlagsgesellschaft, Stuttgart, vol. 42, pp. 45-59 (2001).
49. Knight, J. B., Vishwanath, A., Brody, J. P. and Austin, R. H. “Hydrodynamic focussing on a silicon chip: mixing nanoliters in microseconds”, Phys. Rev. Lett. 80(17) (1998) 3863.
50. Lagaly, G., Schulz, O. and Ziemehl, R. Dispersionen und Emulsionen, Steinkopff Verlag, Darmstadt (1997).