Low-cost HARMS process

Sensors and Actuators, A: Physical

Volumn 61, Issue 1-3, 1997, Pages 392-399

  Bischofberger, Roger ^a   Zimmermann, Heinrich ^a   Staufert, Gerhard ^a  

^a Institute of Microsystem Technology   (Switzerland)

Author keywords

Electroforming; Electrolyte monitoring; HARMS process; LIGA technique; Spray development; UV depth lithography

Indexed keywords

ASPECT RATIO; ELECTROFORMING; ELECTROLYTES; FILTRATION; PH; PHOTOLITHOGRAPHY; SURFACE ACTIVE AGENTS; TITRATION;

ELECTROLYTE MONITORING; HIGH ASPECT RATIO MICROSYSTEMS (HARMS); SPRAY DEVELOPMENT; ULTRAVIOLET DEPTH LITHOGRAPHY;

MICROELECTROMECHANICAL DEVICES;

EID: 0031163813     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(97)80295-6     Document Type: Article

References (5)

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