Large full scale, linearity and cross-axis rejection in low-power 3-axis gyroscopes based on nanoscale piezoresistors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2015-February, Issue February, 2015, Pages 37-40

  Dellea, Stefano ^a   Giacci, Federico ^a   Longoni, Antonio ^a   Rey, Patrice ^b   Berthelot, Audrey ^b   Langfelder, Giacomo ^a  

^a POLITECNICO DI MILANO   (Italy)

^b CEA LETI   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EUTECTICS; GYROSCOPES; MECHANICS; NANOSENSORS; NANOTECHNOLOGY; WAFER BONDING;

3-AXIS GYROSCOPES; COMPETITIVE PERFORMANCE; EUTECTIC BONDING; FULL-SCALE RANGES; LINEARITY ERRORS; PIEZO-RESISTIVE; PIEZORESISTIVE READ-OUT; STATE OF THE ART;

MEMS;

EID: 84931084803     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2015.7050880     Document Type: Conference Paper

References (13)

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