A CMOS capacitive vertical-parallel-plate-array humidity sensor with RF-aerogel fill-in for sensitivity and response time improvement

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2015-February, Issue February, 2015, Pages 767-770

  Chung, Vincent P J ^a   Cheng, Chao Lin ^a   Yip, Ming Chuen ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Capacitive sensor; CMOS MEMS; Humidity sensor; RF aerogel; Vertical parallel plate array

Indexed keywords

AEROGELS; CMOS INTEGRATED CIRCUITS; HUMIDITY SENSORS; MECHANICS; MEMS; RESPONSE TIME (COMPUTER SYSTEMS);

CAPACITIVE HUMIDITY SENSORS; CMOS-MEMS; MOISTURE SENSITIVE POLYMERS; MONOLITHIC INTEGRATION; MONOLITHICALLY INTEGRATED; RESORCINOL FORMALDEHYDES; RF AEROGELS; VERTICAL PARALLEL PLATES;

CAPACITIVE SENSORS;

EID: 84931072392     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2015.7051071     Document Type: Conference Paper

References (7)

1. T. Boltshauser, C. Azeredo Leme and H. Baltes, "High sensitivity CMOS humidity sensors with on-chip absolute capacitance measurement system," Sens. Actuators B, vol. 15, pp. 75-80, 1993.
2. C.-L. Dai, "A capacitive humidity sensor integrated with micro heater and ring oscillator circuit fabricated by CMOS-MEMS technique," Sens. Actuators B, vol. 122, pp. 375-380, 2007.
3. N. Lazarus and G. K. Fedder, "Designing a robust high-speed CMOS-MEMS capacitive humidity sensor," J.Micromech. Microeng., vol. 22, p. 085021, 2012.
4. V. P. J. Chung, J. K.-C. Liang, C.-L. Cheng, M.-C. Yip and W. Fang, "Development of a CMOS-MEMS RF-aerogel-based Capacitive Humidity Sensor," in Proc. IEEE Sensors, pp. 190-193, 2014.
5. U. Kang and K. D. Wise, "A high-speed capacitive humidity sensor with on-chip thermal reset," IEEE Trasn. Electron Devices, vol. 47, pp. 702-710, 2000.
6. R. W. Pekala, "Organic aerogels from the polycondensation of resorcinol with formaldehyde," J. Mater. Sci., vol. 24, pp. 3221-3227, 1989.
7. L. M. Hair, R. W. Pekala, R. E. Stone, C. Chen and S. R. Buckley, "Low density resorcinol-formaldehyde aerogels for direct drive laser inertial confinement fusion targets," J. of Vacuum Sci. & Tech. A, vol. 6, pp. 2559-2563, 1988.