Development of a CMOS-MEMS RF-aerogel-based capacitive humidity sensor

Proceedings of IEEE Sensors

Volumn 2014-December, Issue December, 2014, Pages 190-193

  Chung, Vincent P J ^a   Liang, Jack K C ^a,b   Cheng, Chao Lin ^a   Yip, Ming Chuen ^a   Fang, Weileun ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

^b Miradia Inc   (United States)

Author keywords

Capacitive transducer; CMOS MEMS; RF aerogel humidity sensor

Indexed keywords

AEROGELS; CMOS INTEGRATED CIRCUITS; EFFLUENT TREATMENT; HUMIDITY SENSORS; MOISTURE CONTROL; SOL-GEL PROCESS; SOL-GELS; SUPERCRITICAL FLUIDS;

CAPACITIVE HUMIDITY SENSORS; CAPACITIVE TRANSDUCERS; CMOS-MEMS; MINIMUM SENSITIVITIES; MOISTURE DIFFUSION; RESORCINOL FORMALDEHYDES; RF AEROGELS; VERTICAL PARALLEL PLATES;

CAPACITIVE SENSORS;

EID: 84926342662     PISSN: 19300395     EISSN: 21689229     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2014.6984965     Document Type: Conference Paper

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