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Microelectronic Engineering

Volumn 141, Issue , 2015, Pages 203-206

Maskless laser processing of graphene

(6) Wakaya, Fujio a Kurihara, Tadashi a Yurugi, Nariaki a Abo, Satoshi a Abe, Masayuki a Takai, Mikio a

a OSAKA UNIVERSITY (Japan)

Author keywords

Graphene; Maskless laser process; Ultraviolet laser

Indexed keywords

GRAPHENE; IRRADIATION; KINETIC ENERGY; KINETICS; THERMAL EXPANSION; ULTRAVIOLET LASERS;

LASER PROCESS; LAYER NUMBER; MASKLESS PATTERNING; SELECTIVE PROCESS; SUBSTRATE SURFACE; THICKNESS DEPENDENCE; THRESHOLD LASERS; ULTRAVIOLET PULSED LASERS;

PULSED LASERS;

EID: 84926469227 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2015.03.049 Document Type: Article

Times cited : (8)

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