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Microelectronic Engineering

Volumn 110, Issue , 2013, Pages 358-360

Ultra-violet laser processing of graphene on SiO2/Si

(4) Wakaya, Fujio a Kurihara, Tadashi a Abo, Satoshi a Takai, Mikio a

a OSAKA UNIVERSITY (Japan)

Author keywords

Graphene Maskless laser process Ultra violet laser

Indexed keywords

GRAPHENE; IRRADIATION; TIN OXIDES;

ELASTIC VIBRATION; FAST PROCESS; GRAPHENE LAYERS; INDIUM TIN OXIDE; LASER PROCESS; MASK LESS; POWER DENSITIES; TRANSPARENT ELECTRODE;

PULSED LASERS;

EID: 84885180021 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2013.02.062 Document Type: Article

Times cited : (12)

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