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Volumn 106, Issue 2, 2015, Pages
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Ultraviolet surface plasmon-mediated low temperature hydrazine decomposition
a a b b b a |
Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL REACTIONS;
DEPOSITION;
FILM GROWTH;
HYDRAZINE;
MASS SPECTROMETRY;
MOLECULES;
NANOIMPRINT LITHOGRAPHY;
NITRIDES;
PHOTODISSOCIATION;
SUBSTRATES;
TEMPERATURE;
CONVENTIONAL METHODS;
ELEVATED TEMPERATURE;
HYDRAZINE DECOMPOSITION;
HYDROGEN ABSTRACTION;
OPTICAL CROSS SECTIONS;
PHOTODISSOCIATION PRODUCTS;
REACTIVE PRECURSORS;
REFLECTANCE SPECTROSCOPY;
PLASMONS;
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EID: 84923766745
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.4905593 Document Type: Article |
Times cited : (11)
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References (24)
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